09,11,2026 7 views
Nikon Corporation's industrial metrology business unit recently released the NEXIV VMZ-NWL 200 automatic wafer measurement system to address the challenges of wafer metrology in semiconductor back-end processes, which traditionally involve more manual work than front-end process control. Therefore, the main target market for NEXIV VMZ-NWL 200 is measurement centered around back-end semiconductor manufacturing processes.
The NEXIV VMZ-NWL 200 alleviates the shortage of skilled manual measurement technicians. The semiconductor industry is developing along the path of miniaturization, which has increased the skill level required for measurement and reduced the number of available engineers. On the other hand, the semiconductor market continues to expand, so more and more measurement opportunities are being provided to fewer and fewer people. Therefore, manual measurement using traditional optical microscopes has reached its limit.
NEXIV VMZ-NWL 200 is a system that automatically measures 6-inch or 8-inch wafers stored in a carrier based on a measurement program. The reliability of NEXIV and the stable wafer loading using NWL ensure high repeatability of measurements. This system allows the use of specialized software to intuitively select the chip to be measured. Therefore, anyone can obtain the required chip measurement results with high reliability. In addition, it is possible to track the measurement time and procedure, which helps improve traceability.
The system was designed with safety in mind and provided a protective cover to prevent damage caused by operator error. The operation complies with SEMI international standards S2, S8, and F47.
About Nikon Metrology
Nikon provides a variety of products, services, and solutions worldwide based on advanced optoelectronic and precision technologies accumulated over the company's 100 year history. The group continues to create new value and contribute to improving the quality of life and manufacturing in various forms. Nikon's Industrial Metrology Business Unit (IMBU) provides integrated and optimized ultra-high precision solutions that are not only customized and cost-effective, but also run well immediately after implementation. The latest development under Nikon Digital Manufacturing is the closer collaboration between IMBU and the company's Digital Solutions Business Unit (DSBU), which has launched a range of optical additive and subtractive manufacturing solutions for processing materials with various sub micron surface finishes.
