09,11,2026 7 views
On September 9th, the 27th China International Optoelectronics Expo (CIOE) kicked off at the Shenzhen International Convention and Exhibition Center. This exhibition brings together over 4000 companies from more than 30 countries and regions around the world, with an exhibition area of 260000 square meters. As a representative enterprise in the field of laminar flow measurement and control in China, Shaanxi Yidu Intelligent Technology Co., Ltd. (hereinafter referred to as "Yidu") showcased multiple self-developed products at the exhibition.
Yidu booth site (booth number: 7A97)
The laminar flow mass flowmeter and controller products of Shaanxi Yidu Intelligent Technology Co., Ltd. have passed the relevant certification of China Academy of Metrology, and have the large-scale production capacity of universal laminar flow mass flowmeters. At the same time, they have the CPA certification qualification for laminar flow flowmeters. The company was established in 2015, with a research and development team led by postdoctoral and doctoral fellows in Aerospace Engineering at Northwestern Polytechnical University. The team has been deeply involved in laminar pressure difference and microflow measurement and control technology for over ten years, and holds more than 20 patents. They have participated in national level projects such as the compilation of the "Flow Measurement Technology Encyclopedia" and the Ministry of Science and Technology's hydrogen energy key special project. The product range covers 0.5SCCM~5000SLPM, supporting more than 70 gases, serving industries such as semiconductors, photovoltaics, fuel cells, and biopharmaceuticals, and has established a localized service network covering multiple regions in China.
Relying on profound technological accumulation, this exhibition will showcase the P series portable mass flow meters, EC series integrated mass flow controllers, and TC series pocket type mass flow controllers, corresponding to on-site calibration, industrial process control, and small equipment integration scenarios.
P series portable mass flow meter: portable and portable, fast on-site flow verification
Yidu P Series New Generation Portable Mass Flow Meter
The P series is a new generation of portable gas mass flow meters developed by Yidu, specifically designed for rapid flow measurement, online flow comparison, and equipment inspection. The product adopts the principle of laminar pressure difference measurement, based on the Hagen Poiseuille law, reads the pressure difference at both ends of the laminar flow element to calculate the volumetric flow rate, and obtains the standard volumetric flow rate and mass flow rate through pressure and temperature correction; The color touch screen can simultaneously display parameters such as standard flow rate, working condition flow rate, cumulative flow rate, pressure, temperature, etc.
The device has a built-in battery that can last for up to 15 hours and can be measured independently without the need for an external data cable; The range covers 0.5SCCM~5000SLPM, with an accurate reading accuracy of up to ± 0.5% and a repeatability accuracy of up to ± 0.1% F.S. The response time is ≤ 100ms, and a low voltage loss structure can be optionally selected.
EC series integrated laminar mass flow controller: fully self-developed core components, suitable for complex working conditions
Yidu EC series integrated laminar mass flow controller
The EC series is an integrated universal gas mass flow controller developed by Yidu, suitable for various industries and scenarios. The five core technologies of laminar flow components, precision proportional control valves, differential pressure sensors, software algorithms, and circuit design are all independently developed. The range covers 0.5SCCM~5000SLPM, with the highest accuracy of ± 0.5% of the set value, the highest repeatability accuracy of ± 0.1% F.S., and the highest flow control range ratio of 200:1.
The product has a wide temperature adaptability range of -50 ℃~80 ℃, a maximum working pressure of less than 2MPa, and supports negative pressure. More than 70 gases can be switched freely; Supports various communication methods such as RS485, PROFIBUS, EtherCAT, PROFINET, DeviceNet, and 4-20mA/0-5V, providing universal, corrosion-resistant, semiconductor, anti adsorption and other scenario models, as well as VCR, card sleeve, G-thread, IGS and other gas path interfaces.
TC series pocket type laminar mass flow controller: small size, high performance
Yidu TC series pocket type laminar flow mass flow controller
The TC series is a new generation compact gas mass flow controller developed by Yidu, with a body length of only 70mm and equipped with a detachable magnetic touch screen. The product adopts the principle of laminar pressure difference measurement and is equipped with a self-developed high-precision electromagnetic proportional valve. Combined with sensor feedback, it achieves precise closed-loop control.
The product range covers 0.5SCCM~20SLPM, with an accuracy of up to ± 0.5% of the set value and a repeatability accuracy of up to ± 0.1% F.S. The response time is ≤ 600ms, supporting more than 70 types of gas switching, and providing G-thread VCR、 Multiple gas path interfaces such as card sleeves and IGS are suitable for flow measurement and control integration of small experimental platforms and compact process modules.
At the exhibition site, the Yidu booth attracted numerous visitors from the semiconductor, optoelectronic, and new energy industries to stop and inquire. Technicians have in-depth discussions with customers on measurement accuracy, multi gas adaptation, long-term operational stability, and other issues, based on application cases such as CVD process, fuel cell testing, and equipment calibration.
In the future, Yidu will continue to deepen its core technology of laminar pressure differential flow measurement and control, iterate and optimize its product matrix, improve localized services, and use domestically developed precision flow devices to assist in the independent upgrading of the semiconductor, new energy, and high-end scientific research equipment industry chains.
