SR series film thickness sensor

1、 Product Overview

SR series film thickness sensorProvide a fast and stable online measurement solution for film thickness.

2、 Product Features

Easy to operate, compact and easy to install;

High speed and high resolution；

■Multiple customized probes meet the needs of multiple scenarios;

■Wide spectrum covering multiple film thickness requirementsUse;

■Suitable for online film thickness measurement and quality assessment；

■Wide spectrum to meet the requirements of multiple application scenarios.

3、 Measurement principle

Technical Specifications

*1: Calculated with a refractive index of 1.5 for glass

*2: Calculated using the refractive index of silicon at 3.67

*3: Measure 1 σ of 500 nm SiO2 thickness

*4: Measure the 1 σ of Si films with a thickness greater than 30 µ m

Wuhan Optics Technology Co., Ltd. is a high-tech enterprise specializing in the research and development, manufacturing, and sales of ellipsometers and optical nano measurement equipment in China. The company was jointly founded by several experts with more than 20 years of experience in polarization optical measurement, and closely cooperates with Huazhong University of Science and Technology. It is a highly advantageous technical team in the field of ellipsometry optical instruments in China.

The company is registered in Wuhan Donghu National Independent Innovation Demonstration Zone, based in Optics Valley and facing the world, providing comprehensive solutions such as instruments, software, and services for scientific research and industrial users.

The product is widely used in many fields such as integrated circuits, semiconductors, photovoltaic solar energy, flat panel displays, LED lighting, storage, biology, medicine, chemistry, electrochemistry, optical coating, photolithography materials, etc.