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E-mail
meng.yan@eoptics.com.cn
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Phone
18696172880
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Address
Building 6, No. 10 Financial Port Fourth Road, Donghu New Technology Development Zone, Wuhan City
Product Categories
Wuhan Yiguang Technology Co., Ltd
HRSR series film thickness sensor
NegotiableUpdate on 01/19
- Model
- Nature of the Manufacturer
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Overview
Thin film thickness measuring instrument, HRSR series film thickness sensor product features $n $n ■ ultra precision thickness measurement, meeting the thickness monitoring of 5 μ m-800um; $n $n ■ can measure all surfaces with roughness, reflection, or opacity; Highly adaptable to harsh industrial environments; Not sensitive to heat, moisture, or vibration; The sampling rate is greater than 3KHz.
Product Details
1、 Product Overview
HRSR film thickness sensor provides an online measurement solution for complex semiconductor film layers.
IIFilm thickness sensorProduct Features
Ultra precision thickness measurement, capable of monitoring thicknesses ranging from 5 μ m to 800um;
Can measure all surfaces with roughness, reflection, or opacity;
High adaptability to harsh industrial environments;
Not sensitive to heat, moisture, or vibration;
The sampling rate is greater than 3KHz.
3、 Measurement principle
Technical Specifications
Wuhan Optics Technology Co., Ltd. is a high-tech enterprise specializing in the research and development, manufacturing, and sales of ellipsometers and optical nano measurement equipment in China. The company was jointly founded by several experts with more than 20 years of experience in polarization optical measurement, and closely cooperates with Huazhong University of Science and Technology. It is a highly advantageous technical team in the field of ellipsometry optical instruments in China.
The company is registered in Wuhan Donghu National Independent Innovation Demonstration Zone, based in Optics Valley and facing the world, providing comprehensive solutions such as instruments, software, and services for scientific research and industrial users.
The product is widely used in many fields such as integrated circuits, semiconductors, photovoltaic solar energy, flat panel displays, LED lighting, storage, biology, medicine, chemistry, electrochemistry, optical coating, photolithography materials, etc.
