SR Mapping Reflective Film Thickness Gauge

I. Overview

SR-MappingReflective film thickness gaugeseriesUsing the principle of reflection interference for non-destructive measurement, the reflection spectrum formed by the interference of reflected light on the surface of the thin film and reflected light at the interface between the thin film and the substrate is analyzed. Combined with an R-Theta displacement table, it is compatible with 6 to 12 inch samples and can quickly scan the entire sample, accurately measure the thickness and optical constants of the thin film, and evaluate the uniformity of the film thickness.

■Optical thin film measurement solution；

Non contact and non-destructive measurement;

The core algorithm supports thin film to thick film and single-layer to multi-layer thin film analysis;

■ Film thickness repeatability measurement accuracy: 0.02nm

Fully automatic measurement, the number and position of measurement points can be edited as needed in the Recipe

■Using high-intensity halogen lamp light source, the spectrum covers the ultraviolet visible to near-infrared range;

Adopting a highly integrated design of optoelectronics and mechatronics, with a small size and easy operation;

Based on the principle of interference between reflected light at the upper and lower interfaces of the thin film layer, it is easy to analyze single-layer thin films to multi-layer ones;

■Configure powerful core analysis algorithms: FFT analysis for thick films, curve fitting analysis for analyzing the physical parameter information of thin films;

3、 Product application

Widely used for thin film measurement of various media protective films, organic thin films, inorganic thin films, metal films, coatings, etc.

Technical Specifications