SE-VF spectroscopic ellipsometer

I. Overview

SE-mIt is a specialized spectroscopic ellipsometer for measuring micro area graphic structures customized for the semiconductor industry,It adopts1 Ultra small micro light spot detection and measurement technology， 2 Customized ultra fast measurement speedWaiting for technology. Can apply transparencyThe n/k/d measurement of thin films such as anti reflection films and conductive films on various substrates is suitable for various optical parameter analysis of micro area graphics.

2、 Featured Features

■ Customizable spot size, with a minimum of 30um;

Ultra fast measurement, with a single measurement time of less than 0.5 seconds;

The series configuration is flexible and supports customized design of functions;

■Compact structure, more suitable for online integrated measurement.

3、 Measurement examples

Measurement of micro area graphic structure

4、 Application scenarios

Applied to optical constant measurement, suitable for various coating detection applications such as optical thin films.