Real time monitoring instrument for environmental dust particles (PFS)

Fastmicro Real time monitoring instrument for environmental dust particles (PFS)

FastmicroReal time monitoring instrument for environmental dust particles (PFS)Developed specifically for measuring the sedimentation rate of particles in clean rooms, it supports data collection at second intervals and accurately measures particles above 0.5 μ m. Combining intuitive and easy-to-use software systems, we help customers achieve a leapfrog upgrade from simple air monitoring to surface cleanliness monitoring, providing scientific basis for process optimization and continuous improvement of cleanliness.

Product Features:

• Data output and visualization: compliant with ISO 14644-17 standard

• High throughput detection: capable of detecting particles as low as 0.5 μ m

• Quick: Complete 2-inch area detection in 10 seconds

• Quantitative: Suitable for validation and monitoring in production and research and development environments

Consistency measurement during the production process

Quick:Continuous monitoring in seconds

Quantitative:Validation and monitoring applicable to production and research and development environments

Easy to operate:Operators can use it with simple training

Accurate:High resolution measurement (quantity, timeline, position, size)

uniformity: Repeatable objective measurement results

High throughput:Real time on-site analysis

Monitoring Particle Deposition Rate (DPRL)

The Fastmicro real-time dust particle monitoring system (PFS) adopts a compact working environmentIndustrial design, based on ISO 14644-9 and ISO 14644-17 standards, monitoring particlesGrain sedimentation rate (DPRL). This device enables process/quality engineers to operate in real-timeMonitor the particle settling situation in key areas of the cleanroom environment.

Realize continuous monitoring in key areas

Unlike traditional methods that only monitor suspended particles in the air, this system can monitor key tablesContinuous monitoring of particle pollution control and cleanliness verification on the surface.Submicron particles are not always suspended in the air, they may deposit in the airThe key surface affects the technical cleanliness and product quality.

This instrument uses 2-inch wafers to collect dust particles in the environment and canPerform continuous particle settling monitoring on the surface of the wafer every 10 seconds or so.Its detection particle size is ≥ 0.5 (certified by NIST) and accurately quantifiedSettlement rate.The software interface is simple and intuitive, and reports can be generated with just one click.

Fastmicro PFSIt is a high-precision in-situ particle detection instrument that helps engineers toChallenges in controlling clean processes.

Combined with Phenom XL scanning electron microscopy, it canConvenient and efficient further characterization and traceability analysis of particulate matter components.