Full spectrum elliptical polarization thickness gauge SE950

Advantage:

1. Micro spot function: Standard configuration micro spot spot size 80x120 microns. Special optical design and grinding grade high-precision Z-axis combination can automatically remove reflections from the back of transparent substrates During the focusing process, the focusing position of the film layer can be automatically determined, and the reflection behind the transparent substrate can be overcome through an optical slit

2. Using signal autofocus, the measurement signal and focus signal are the same signal, effectively avoiding measurement position errors.

3. Automatic tracking of analyzer: greatly improves the measurement accuracy of ellipsometer, especially beneficial for material analysis of ultra-thin film layer and the accuracy of ψ and Δ

4. Electric automatic adjustable attenuation film: It can automatically or manually adjust the saturation level of different sample signals (100%~0.1%), and can segment the UV signal and visible light signal intensity to obtain the best measurement signal

5. Software automatic analysis and fitting: Provides pre analysis function for film thickness and refractive index, database comparison ability for unknown materials, software automatic analysis simplifies operation, and overcomes the measurement difficulties caused by professional operation of ellipsometers.

6. Remote control: Breaking through the limitations of on-site service and training for ellipsometers, greatly improving the efficiency of after-sales service

7. High quality DUV spectrometer: spectral range 220nm-1100nm, (optional up to 1700nm) resolution<1nm with built-in semiconductor cooling, high dynamic ratio, signal-to-noise ratio to minimize noise impact as much as possible

8. Automatically generate 2D or 3D Mapping maps and analyze data, automatically save spectra, and summarize and upload data

9. The recipe greatly reduces the testing time to 1-3 seconds, improving testing efficiency.

10. The design adopts a dual fiber structure with anti UV passivation and advanced disconnection function, greatly improving spectral stability and long-term reliability.

11. High stability standard film thickness repeatability accuracy<0.5A, refractive index repeatability accuracy<0.0005

12. The film thickness testing range is 1nm-20 microns, which can be used for testing transparent or opaque substrates

13. Free modeling

Specifications:

Optical principle:

During the short period of time when light waves come into contact with the surface of optical components and leave the surface, their polarization occursThe polarization state will definitely change. Elliptical polarimeter is a device used to measure light wavesInstruments that penetrate optical components or reflect changes in polarization state before and after reflection from the surface of optical components. fromThe change in polarization state is the result of the interaction between light waves and optical component materialsThis can be inferred from the change in polarization state to obtain the physical properties of the optical component surface. HereThe surface of the optical component may be the surface of the optical component, or it may be a single-layer film or multi-layerThe stack of membranes may also be a fouling layer on the surface of optical components.
Light reflects off the surface of the sample at non-zero incident angles due to the thickness of the sample and its response to lightThe measurement involves changes in polarization state (resulting in changes in phase and amplitude) caused by absorption or transparencyWe call this method ellipsometry measurement. For each wavelength during measurement, we obtain two independent parametersNumbers PSI and △