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Daimei Instrument Technology Service (Shanghai) Co., Ltd
FR-Scanner-AIO-Mic-XY300
NegotiableUpdate on 12/23
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Overview
FR-Scanner-AIO-Mic-XY300 is an integrated automatic thin film thickness measurement system used for measuring the thickness of single-layer and multi-layer coatings on fully automated patterned wafers. The electric X-Y stage provides a stroke size of 300mm x 300mm, which can be accurately measured when vacuum fixed on the stage. Various optical configurations can be provided within the spectral range of 200-1700nm according to the application requirements of measuring thickness and wavelength range
Product Details
Product Introduction:
The FR-Scanner-AlInOne-Mic-XY300 modular thickness measurement system integrates optical, electronic, and mechanical modules, which can be used for accurate measurement of both non patterned and patterned thin films (such as micro patterned surfaces, rough surfaces).
Place the wafer on a vacuum suction cup (wafer size diameter ≤ 300mm) and equip it with reflectivity standard components. Measurements are performed by powerful optical modules, with spot sizes as small as a few micrometers. The electric platform provides a stroke of 300 millimeters in the XY direction, with excellent performance in speed, accuracy, and repeatability
FR-Scanner-AIO-Mic-XY300Provided:
Real time reflectance spectroscopy measurement
O Film thickness, optical properties, non-uniformity measurement, thickness mapping
O Use an integrated, USB connected high-quality color camera for imaging
Extensive statistical data on measurement parameters
The semi-automatic pattern alignment function is used to measure periodic graphic areas
odifferentSoftware features, such as Click2Move (screen click to locate measurement points), scale bar
Attachment:
FR AutoFocus: 100mm long linear axis for autofocus, with two operating modes: image focus (contrast)/reflection intensity
Rotation Module: The electric platform of the rotation module provides high resolution and accuracy
FR Filter Wheel: The electric filter wheel module has a slot that can accommodate 12 filters and is automatically controlled by a computer. Filter size: 0.5 inches in diameter, with a maximum of 6 filters (1 inch)
FR AutoTurret: The automatic turret is computer-controlled and can accommodate 4 objective lenses. The lens switching speed is approximately 1.0-3.0 seconds
Lens: Long working distance VIS/NIR lens: 5X, 10X, 20X, 40X, 50X
Reflective UV/NIR lenses: 10X, 15X, 25X, 40X
Pump: Low noise vacuum pump, 2.5L/min, vacuum degree -60kPa
Chucks: 6-inch photomask chuck with reference wafer area, multi wafer chuck (100-300mm and irregular shaped wafers), including reference area and dark area, used for automatic reference
Specifications:
2D thickness chart:
3D thickness map:
Measurement principle:
