Elliptical testing machine

1、 Product Overview

Yiguang TechnologyElliptical testing machineAs a small ellipsometer integrated machine, it achieves online/offline overall ellipsometer measurement solutions for different ellipsometer measurement modules through highly modular design and integrated electrical and pneumatic technology.

2、 Product Features

■Support laboratory research on integrated control measurement technology for overall ellipsometry;

Support offline custom multi-point scanning measurement and output reports for large substrates on the production line;

Support multiple ellipsoidal polarization schemes and multi combination integration

■ Support customization of probe modules and sample machines

3、 Application scenarios

The film thickness, optical constants, and structural characterization of one-dimensional and two-dimensional nano gratings of various isotropic and anisotropic thin film materials applied in scientific research; Full film offline rapid scanning measurement of thin films (alignment film, photoresist, ITO, luminescent film, packaging film) involved in the new optoelectronic device industry in the industrial field.

Reference design scheme

Highly integrated ellipsometry technology solution

Technical Specifications