Elliptical online monitoring equipment

Elliptical polarimeter, an online monitoring equipment for ellipsometry, is a specially designed online thin film measurement system for the quality control needs of PI alignment film, photoresist film, ITO film, organic light-emitting film, organic/inorganic packaging film, etc. involved in the mass production of new flat panel displays such as LCD and OLED. Applicable to air N2、 Under vacuum and other environmental conditions, automatic rapid scanning measurement of thickness distribution and optical constant distribution of various film structures on glass substrates can be achieved.

　　EllipsometerA specially designed online thin film measurement system is designed to meet the quality control needs of PI alignment film, photoresist film, ITO film, organic light-emitting film, organic/inorganic packaging film, and other materials involved in the mass production of new flat panel displays such as LCD and OLED.Elliptical online monitoring equipmentApplicable to air N2、 Automatically achieve thickness distribution and optical constant distribution of various film structures on glass substrates under vacuum and other environmental conditions.

It can determine the polarization state of light by detecting the direction of electric field vibration and phase difference, including linear polarization, circular polarization, and elliptical polarization. It mainly consists of sources, samples, analyzers, and detectors. When light passes through the sample, there will be a change in polarization state. At this time, the angle of the analyzer is rotated to change the received light signal of the detector, and the signal intensity at each angle is recorded. By mathematically processing the signal, the influence of the sample on the polarization state of light can be obtained.

EllipsometerComposed of the following parts:

Light source: Typically, incandescent or sodium lamps are used as the light source. These light sources can emit a continuous spectrum or monochromatic light of a specific wavelength.

Polarizer: Polarizers can convert unpolarized or linearly polarized light into polarized light with a determined polarization direction.

Sample rack: A sample rack is a position used to place the sample to be tested. In polarizers, different types of samples such as flat glass, crystals, and films can be used.

Rotator: A rotator is used to change the angle of the sample in space. By measuring the rotation angle of the sample along two axes, information such as the refractive index and thickness of the sample can be obtained.

Analyzer: The analyzer is another polarizer used to detect the effect of the sample on the rotation and linear polarization state of light.

Detector: A detector is used to measure the absorption and optical rotation of a sample towards light. In different polarizers, the detectors used are also different, some use electron multiplier tubes, while others use pixel arrays.