Desktop automatic film thickness gauge

The NS-30 series (desktop automatic film thickness gauge) is a desktop automatic film thickness measurement and analysis system. On the basis of film thickness measurement, an automatic sample stage is superimposed to automatically measure the set points and further generate 2D and 3D data distribution maps. The NS-30 series is suitable for measuring wafer film thickness or photovoltaic cell film thickness.

The NS-30 series (desktop automatic film thickness gauge) is a desktop automatic film thickness measurement and analysis system. achievableMeasurement of refractive index, absorption index, extinction coefficient,On the basis of film thickness measurement, an automatic sample stage is superimposed to automatically measure the set points and further generate 2D and 3D data distribution maps. The NS-30 series is suitable for measuring wafer film thickness or photovoltaic cell film thickness.

2、 NS-30 automatic mapping film thickness gauge parameter specifications

model	NS-30UV	NS-30	NS-30NIR
wavelength range	190 nm – 1100 nm	380 nm – 1050 nm	950 nm – 1700 nm
Thickness measurement range1	1 nm – 40 μm	15 nm – 80 μm	150 nm – 250 μm
accuracy2	1 nmor0.2%	2 nmor0.2%	3 nmor0.4%
precision3	0.02 nm	0.02 nm	0.1 nm
stability4	0.05 nm	0.05 nm	0.12 nm
spot size	1.5 mm	1.5 mm	1.5 mm
measure speed	< 1s(Single measurement)	< 1s(Single measurement)	< 1s(Single measurement)
light source	Tungsten halogen lamp+Deuterium lamp	Tungsten halogen lamp	Tungsten halogen lamp
sample size	Diameter from1mmto300mmOr larger	Diameter from1mmto300mmOr larger	Diameter from1mmto300mmOr larger