Nikon releases new CNC image measurement system model "NEXIV VMZ-S3020"
NEXIV new series suitable for automotive electronics and semiconductor components

「NEXIV VMZ-S3020」
Nikon Solution Co., Ltd. (President: Haruhisa Mari, Minato ku, Tokyo), a subsidiary of Nikon Corporation (President: Haruhisa Sonoda, Shinagawa ku, Tokyo), has developed a new "NEXIV VMZ-S" series of CNC image measurement systems for precision components such as electronics and semiconductors, with the first release being the "NEXIV VMZ-S3020".
The CNC image measurement system "NEXIV" is a device that uses Nikon's optical technology and image processing technology to automatically measure electronic and semiconductor components. Through image analysis and high-speed accurate edge detection, complex and special shaped objects can also be quickly measured. The "NEXIV VMZ-S" series products released this time not only maintain the accuracy of the previous model "NEXIV VMZ-R" series products, but also achieve higher production capacity.
NEXIV VMZ-S3020 will exhibit at JIMTOF 2020 Online (November 16th to December 11th, 2020) online exhibition.
In addition, large-sized stage models "NEXIV VMZ-S4540" and "NEXIV VMZ-S6555" are also under development and are expected to be released in the second half of 2021.
Release Summary
| Product name | CNC image measurement system "NEXIV VMZ-S3020" |
|---|---|
| Order acceptance time | November 12, 2020 |
*Start nowThe delivery time is January 2021.
The origin of development
In recent years, with the expansion of the autonomous driving and electric vehicle markets, the automotive industry has experienced rapid development in electrification, resulting in an increasing number of electronic and semiconductor components used in automobiles. Due to the importance of life safety, the parts used also require very strict quality control, and the requirements for measuring equipment have also increased accordingly. Therefore, Nikon has developed and launched the "NEXIV VMZ-S" series of CNC image measurement systems suitable for measurement purposes such as automotive electronics and semiconductor components.
main specialty
1. High production capacity
The "NEXIV VMZ-S3020" provides high-precision measurement with a high-precision linear grating ruler and a precision stage, while achieving higher production capacity compared to the previous "NEXIV VMZ-R" series products through high-speed stage movement and image processing. Ensured the accuracy and reproducibility of the customer, and shortened the measurement time.
2. High quality images and high-precision measurements
Through distortion free high-quality images, reliable measurement results can be obtained even when not near the center of the field of view. In addition, by selecting coaxial surface light, bottom transmitted light, and 8 fan-shaped circular lights based on the shape of the detected object, and adjusting the light intensity and irradiation direction, it is possible to sensitively capture edges that are difficult to detect. Moreover, through high-speed laser scanning at 1000 points per second, the cross-sectional shape of the sample can be obtained, and the shape evaluation in the corresponding height direction can also be performed. Meet the measurement needs of various components.
3. Extraordinary practicality
By using the universal dimension measurement software "NEXIV AutoMeasure" for the series of products, dimension measurement can be carried out smoothly and effectively. In addition, with simple shapes as objects, the function of automating a part of the measurement program production process has been added.
Moreover, in order to meet the requirements of customers using the NEXIV series, the joystick unit used to control the movement of the stage and measuring head adopts a more user-friendly design.
Main specifications
| range (X × Y × Z) |
300 × 200 × 200 mm (250 × 200 × 200 mm for TZ type with low magnification objective lens) |
|---|---|
| Minimum reading | 0.01 μm |
| Maximum load-bearing capacity | 20 kg (Load capacity to ensure accuracy: 5 kg) |
| measurement accuracy (L is the measured length (mm)) |
EUX,MPE, EUY,MPE(X-axis, Y-axis accuracy): 1.2+4L/1000 μ m EUXY,MPE(XY axis accuracy): 2.0+4L/1000 μ m EUZ,MPE(Z-axis accuracy): 1.2+5L/1000 μ m |
| camera | Black and white/color 1/3-inch CMOS |
| Zoom lens model *(Magnification and Field of View) |
Type 1: (0.5~7.5x · 9.33 x 7~0.622 x 0.467 mm) Type 2: (1-15x/4.67 x 3.5-0.311 x 0.233 mm) Type 3: (2-30x2.33 x 1.75-0.155 x 0.117 mm) Type 4: (4-60x, 1.17 x 0.88-0.078 x 0.058 mm) TZ type: (1~120x · 4.67 x 3.5~0.039 x 0.029 mm) Type A: (0.35~3.5x · 13.3 x 10~1.33 x 1 mm) |
| autofocus | Laser autofocus (Type A is optional), image autofocus |
| Lighting* | Types 1-4: Coaxial surface light, bottom transmitted light, and circular light with 8 sectors (All use white LED light source/1, 2, 3 types, 3 angles, 4 types, 1 angle) TZ type: coaxial surface light, bottom light (except for low magnification of VMZ-S3020), dark field illumination Type A: Coaxial surface light, bottom light, circular light with 8 sectors (all using white LED light source/1 angle) |
| Power specifications/rated current | AC100-240V、50/60Hz / 4A – 2A |
| Size (W × D × H/weight) | Body+base: 700 × 730 × 1793 mm/approximately 265 kg Control box: 190 × 450 × 450 mm/approximately 12 kg |
| Land size (W × D) | 2700 × 2400 mm |
*There are 6 lens models to choose from depending on the application. The lighting system equipped with different models of lenses will also vary.












