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instrumentb2bEVG launches second-generation mask alignment system for EVG620HBL

At SEMICONDuring the exhibition, * company providing wafer processing solutions for semiconductor, microelectromechanical systems (MEMS), and nanotechnology applicationsEVGWe have launched a grand product for high brightness light-emitting diodes (HB)-LED)The second-generation fully automatic mask alignment system for mass production.

Gen II is releasing its first generationEVG620HBL will be launched one year later, providing a tool platform primarily designed to meet HB's needs-LEDThe specific needs of customers and the continuous demand from the market to reduce the total cost of ownership. In addition, the EVG620HBL Gen II has optimized the tool footprint of the wafer fab - compared to competing products, the wafer output per square meter of cleanroom space has increased by 55%.

  HBLGen II is designed to meet the needs of large quantitiesDesigned according to specific customer requirements in the manufacturing environment, including the following features:

  Enhanced microscopes can support automatic mask pattern search, further reducing mask setup and replacement time - both improvements are crucial for supporting continuous equipment production in high volume manufacturing (HVM) environments;

  The updated robot processing layout design has wafer mapping function, which provides support for the requirements of wafer traceability;

  Alignment ability (line alignment) has been improved, utilizing markers for individual itemsLEDThe grid is used for positioning, rather than requiring alignment marks that occupy valuable space on the wafer;

  Reduced system occupancy, thereby optimizing the total cost of ownership for operations and increasing the per footprint wafer index.

Compared with competing products, the main feature enhancement advantages of EVG620HBL Gen II bring a 20% reduction in processing wafer unit cost and achieve the industry's highest wafer throughput, producing up to 165 six inch wafers per hour (220 wafers per hour in the first printing mode).
To learn more about EVG products, please call Daimei China.

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