XYZ Modular Variable Temperature Probe Station

The HCP421V-MPS Instec vacuum mini desktop probe station series is a desktop probe station that can move probes from the outside for needle insertion, covering multiple models and temperature ranges. Simultaneously allowing temperature control, probe electrical testing, optical observation, and sample gas environment control. The top cover and bottom shell of the probe station form a vacuum sealed chamber, which can also be filled with protective gases such as nitrogen to prevent the sample from frosting at negative temperatures or oxidizing at high temperatures.

XYZ Modular Variable Temperature Probe StationFeatures

Mimi type temperature control probe station, which can be integrated into various optical devices

Programmable temperature control, covering -190 ℃~400 ℃

Suitable for 10 mm~26 mm wafers and devices

A vacuum chamber that can be evacuated or filled with protective gas for use

Four independent probes that can be moved from outside the device for needle pointing,

Modular design, freely combinable

*Upgradeable to 8 independent probes

Can be controlled from a thermostat or computer software, with software SDK available

SMA connector to BNC four probe, manual needle pointing

XYZ modularizationTemperature control parameters of variable temperature probe station

Temperature range -190 ℃~400 ℃ (negative temperature requires liquid nitrogen refrigeration)

Heating block material silver

Sensor/Temperature Control Method

Maximum heating rate 100 Ω platinum RTD/PID control (including LVDC noise reduction power supply)

30℃/min

Minimum temperature control speed ± 0.01 ℃/min

Temperature resolution 0.01 ℃ RTD sensor

Temperature stability ± 0.05 ℃ (>25 ℃), ± 0.1 ℃ (<25 ℃)

The software function can set temperature control rate, temperature control program, and record temperature control curve

Electrical parameters

The probe defaults to a bent needle probe made of rhenium tungsten material

Probe arm with external XYZ movable probe holder

The needle can be moved from the outside, and each probe holder can point to any position on the sample area

The probe interface defaults to SMA connector to BNC

*Can add internal terminal posts (sample power leads)

The default potential of the sample table is electrical grounding, and it can be electrically suspended (as a back electrode) or equipped with a three-axis interface

optical parameters

Applicable light path reflection light path

Removable and replaceable window panels

Minimum working distance of objective lens 8/12 mm (optional) * WD in cross-sectional view

The observation window range of the upper cover is 45mm, with a maximum viewing angle of ± 50 ° * θ 1 in the cross-sectional view

Window defrosting air blowing defrosting pipeline under negative temperature

structural parameters

Applicable sample with a diameter of 26 mm (standard)

Sample chamber height 4/8 mm (optional)

Probe arm with external XYZ movable probe holder

Coarse adjustment mode+fine adjustment mode, XY coarse adjustment 20mm

XY fine adjustment stroke 10mm, Z fine adjustment 3mm

Adjustment accuracy of 10um

Atmosphere controlled vacuum chamber, can also be filled with protective gas

The cooling of the shell can be achieved by circulating water to maintain the shell temperature near room temperature

Platform size/weight 300 mm x 300 mm x 40 mm/4kg

Configuration List

Basic configuration: Vacuum desktop probe station, mK2000B temperature controller

Optional accessories include installation bracket, liquid nitrogen refrigeration system, shell circulating water cooling system, microscope lens, shock-absorbing table, vacuum system, test source meter, tri coaxial BNC, tabletop electrical suspension, sample electrical lead

Typical Applications

Characterization of electrical performance testing for thin films, two-dimensional materials, nanomaterials, and molecular/organic material devices

Heating block surface electrical grounding, coaxial BNC interface, and tri coaxial BNC interface are required

Probes made of tungsten rhenium, beryllium copper, or other materials are required

It is necessary to perform XYZ movement of the probe inside the platform from the outside

Wafer, semiconductor device, integrated circuit, printed circuit board, photovoltaic panel, LCD/LED testing

Measure IV and CV characteristics, breakdown voltage, leakage current, resistance, dielectric constant, and diode efficiency

HCP402V-MPS Temperature Range Other Optional Models

TP102V-MPS temperature range -40 ℃~180 ℃, sample area, 40mm * 40mm

HCP421V-MPS temperature range -190 ℃~400 ℃, sample area

Φ 26mm-190 ℃~400 ℃, sample area 50mm * 50mm

HP1000G-MPS temperature range 35 ℃~1000 ℃, sample area 25mm * 25mm, airtight chamber

Customized models according to customer needs, suitable for up to 300mm wafer samples