The VTC-110PAX high-throughput automatic rotary coating system adopts an automatic liquid suction and injection method. After injection, a layer of film is automatically spin coated on the surface of the substrate. After spin coating, the substrate is moved to the surface of the baking machine for film drying. Liquids can be stirred to prevent precipitation, and if heating is required, the liquid can be heated. The entire operation process is set on an 11 inch touch screen, which is intuitive and convenient to operate. This equipment is suitable for the research of perovskite thin films and other liquid thin films in colleges and research laboratories, and can be customized according to various customer requirements.
Product Introduction
VTC-110PAX high-throughput automatic rotary coating systemAdopting an automatic liquid suction and injection method, a thin film is automatically spin coated on the surface of the substrate after injection. After spin coating, the substrate is moved to the surface of the glue baking machine for film drying. Liquids can be stirred to prevent precipitation, and if heating is required, the liquid can be heated. The entire operation process is set on an 11 inch touch screen, which is intuitive and convenient to operate. This equipment is suitable for the research of perovskite thin films and other liquid thin films in colleges and research laboratories, and can be customized according to various customer requirements.
Technical Specifications
Product Name |
VTC-110PAX high-throughput automatic rotary coating system |
Product Model |
VTC-110PAX |
Main parameters |
VGB-6 glove box parameters: openable single-sided dual station glove box
Glove box cavity |
Shell material: 304 stainless steel
Dimensions: 1200mm (L) x 780mm (W) x 900mm (H)
The front window is designed to be open to accommodate various instruments |
Chamber environment |
Water content:<1 ppm (20 ° C, 1 atm)
Oxygen content:<1 ppm (20 ° C, 1 atm) |
Front room |
Design with two front chambers
Large front chamber size: Φ 360mm x 600mL
Small front chamber size: Φ 150 mm x 300mm (L) |
Working gas |
Working gas: Inert gases such as N2, Ar, He, etc
Control gas: compressed air or inert gas
Reducing gas: a mixture of working gas and hydrogen gas (H2).
If the purification system only has a water removal function, the reducing gas is the same as the working gas |
Gas purification system |
BASF deoxygenation material from Germany, UOP absorbent material from the United States, automatic control of purification system regeneration process, and automatic water and oxygen removal function; Can maintain gas purity for a long time and continuously: water<1ppm, oxygen<1ppm. |
Pressure control system |
The chamber pressure can be automatically controlled through PLC touch screen
Control accuracy: ± 1Pa
It can also be manually controlled through a foot switch |
filtration system |
Filters are installed at both the intake and exhaust ends
Filtering accuracy: 0.3 μ m |
control system |
SIEMENS color touch screen (6 inches), PLC control system, bilingual switchable in Chinese and English
Water probe: Adopting the American GE brand, with a touch screen display of 0-1000ppm and an accuracy of 0.1 ppm
Oxygen transmitter: Adopting the American AII brand, with a touch screen display ranging from 0 to 1000ppm and an accuracy of 0.1 ppm
Pressure sensor: Adopting the American SETRA brand, with a touch screen display of -2500~2500Pa and an accuracy of ± 1Pa |
glove |
North American brand butyl synthetic rubber |
lighting system |
Configure Philips brand fluorescent tubes |
Instrument size |
2300mm(L) x 1500mm(W) x 1900mm(H) |
Precautions |
When the gas inside the glove box circulates, it is necessary to ensure that the circulation system pipeline is unobstructed and cannot be blocked
Do not allow corrosive gases to enter the glove box
Regularly regenerate the glove box
The deoxygenation rate of the glove box depends on the working gas introduced, and using N2 for deoxygenation is better than introducing Ar
If there is corrosive gas (such as LiPF6 electrolyte) inside the glove box, the bottle containing the liquid must be sealed properly when not in use |
Parameters of film making system
Number of spin coating stations |
4 workstations |
Spin coating machine parameters |
1. Chamber (Material): Polypropylene
2. Sample tray (suction cup): one polypropylene suction cup each with a diameter of 19mm, 60mm, and 100mm
3. Operation mode: can store 12 sets of programs; Each set of programs includes 6 runtime stages
4. Coating speed: 20rpm-12500rpm effective, speed resolution 1rpm/s
5. Adjustment rate: Range of adjustment rate for each segment: 20 rpm -15000 rpm/s
6. Coating time: Each time range: 0-3000s
7. Speed stability: ± 1%
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Liquid mixing system |
Equipped with four heatable magnetic stirring pumps
Heating temperature RT-100 ℃
Magnetic stirring speed: 0-2000rpm
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Injection system |
The pipette automatically moves left, right, up, and down
Effective horizontal movement stroke: 500mm stroke
Horizontal movement speed: 1-1800mm/min (integer).
Vertical up and down movement effective stroke: 250mm;
Up and down lifting speed: 1-200mm/min (integer)
Equipped with four high-precision automatic liquid dispensers
Injection accuracy: ± 1 μ l
Increment: 1 μ l
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Film drying system |
1. Heating power: 3500W
2. Heating temperature: ≤ 500 ℃
3. Temperature control accuracy: ± 1 ℃
4. Heating plate: 350mm × 240mm
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