GSL-1800X-ZF-AM Continuous Multi Chamber Evaporative Coating System

Product Introduction

GSL-1800X-ZF-AM Continuous Multi Chamber Evaporative Coating SystemIt is a high vacuum continuous injection evaporation coating instrument, mainly composed of a transfer chamber and an evaporation coating chamber. The substrate holder can achieve reciprocating motion in the transfer chamber and sputtering chamber, controlled by a frequency modulation motor, automatically synchronized, and the reciprocating position and motion speed can be set. Both chambers have positioning functions, which can achieve origin reset. Specially suitable for vapor deposition of oxygen sensitive metal films (such as Ti, Al, Au, etc.) and small molecule organic compounds. This machine is equipped with four vapor deposition heating boats, each of which can independently perform vapor deposition. There is a rotatable baffle above the heating boats. When one of the heating boats is performing vapor deposition, the baffle covers the other three tungsten boats to prevent mutual contamination between the vapor deposition materials. If some configurations are changed, the evaporation coating of organic materials can also be achieved, which can meet the research requirements of light-emitting devices and organic solar cells. It is an ideal and cost-effective experimental equipment for coating. The bottom of the chamber of the GSL-1800X-ZF4 evaporation coating instrument is equipped with 5 water-cooled electrodes, which can effectively protect the electrode temperature from melting due to high temperature during operation, thereby damaging the electrode. The machine adopts a metal chamber with high vacuum degree, which can reach 5.0 × 10^-7torr， The sample stage can heat the sample at a temperature of room temperature -500 ℃, and is a device for high vacuum evaporation coating.

Main Features

• It consists of two main parts: the transfer chamber and the evaporation coating chamber, which can achieve rapid and continuous sample injection evaporation coating.

• All vacuum control units are integrated into one control box.

• Adopting an independent vapor deposition current controller, the operation is convenient and fast.

• The vacuum chamber is equipped with one KF40 side suction valve (directly connected to the front-end mechanical pump to improve efficiency), one CF150 gate valve (directly connected to the molecular pump), one KF16 flange (installed with resistance gauge), six CF35 flanges (one installed with ionization gauge, one installed with 2-core electrode, and one installed with film thickness gauge), and three spare ones.

• There are 5 water-cooled electrodes at the bottom of the chamber, which can support 4 vapor deposition heating boats.

• The sample stage is installed at the top of the cavity.

• A high-resolution thin film thickness gauge can be installed inside the cavity, with a thickness measurement resolution of 0.1 Å for aluminum.

• A circulating water chiller can be used.

Technical Specifications