- Phone
-
Address
Address: Room 2902, No. 188 Yan'an Middle Road, Changning District, Shanghai
Shanghai Maoshuo Machinery Equipment Co., Ltd
Address: Room 2902, No. 188 Yan'an Middle Road, Changning District, Shanghai
Swiss VAT high-pressure swing isolation valve 16.2 series
Model Series:VAT 16.2
Valve TypeHigh pressure Swing Gate Valve
Design features:
90 ° swing arm opening and closing mechanism, saving 50% space compared to traditional gate valves
Double sealing system (main seal+emergency seal)
Suitable for cross working conditions of high pressure difference (≤ 20 bar) and high vacuum (10 ⁻⁹ mbar)
| parameter | technical indicators |
|---|---|
| pressure range | Ultra high vacuum (10 ⁻⁹ mbar)~20 bar (absolute pressure) |
| temperature range | -30 ° C~+150 ° C (standard)/+250 ° C (high temperature version) |
| leak rate | <1 × 10 ⁻⁹ mbar · l/s (metal seal) |
| Valve body material | 316L stainless steel (optional Hastelloy C-276) |
| Sealing material | Full metal seal (gold/copper) or fluororubber (FKM) |
| Drive Type | Pneumatic (standard)/Electric (optional stepper motor) |
| response time | <1 second (DN100 caliber) |
| Flange Standard | ISO-KF/CF/DN,ANSI 150#~300# |
① Swing arm design
Adopting VAT's Soft Touch technology to reduce particle generation (<5 particles/cm ³ @ 0.3 μ m)
70% reduction in wear compared to traditional gate valves (lifespan>500000 cycles)
② Dual redundant sealing system
main sealMetal seal (standard operating conditions)
Emergency sealingQuick activatable elastomer seal (automatically triggered in case of sudden pressure fluctuations)
③ Intelligent diagnostic interface
Integrated valve position sensor (accuracy ± 0.1 °)
Support predictive maintenance (monitoring sealing status through vibration/temperature)
| industry | Typical Applications | customized requirements |
|---|---|---|
| semiconductor | Etching machine chamber isolation | Aluminum oxide coating, resistant to Cl ₂ corrosion |
| energy | Fusion device vacuum isolation | Non magnetized design (titanium alloy components) |
| chemical industry | High pressure reactor feed control | Hastelloy valve body, acid and alkali resistant |
| scientific research | Synchrotron radiation beamline | Ultra high vacuum compatibility (baked to 250 ° C) |
| Model Example | DN caliber | pressure rating | sealed type | Applicable scenarios |
|---|---|---|---|---|
| VAT 16.2-100-M | DN100 | 10 bar | metal seal | semiconductor equipment |
| VAT 16.2-150-H | DN150 | 20 bar | Hastelloy seal | Chemical high-pressure reaction |
| VAT 16.2-80-XHV | DN80 | Vacuum specific | Bimetallic seal | EUV lithography machine |
Installation specifications:
A torque wrench is required (see table below for flange bolt torque)
Perform 3 pressure cycle tests (0-20 bar) before use
| Flange Standard | Bolt torque (Nm) | Tightening sequence |
|---|---|---|
| DN100 ISO-KF | 12~15 | Cross over method |
| 4' ANSI 150# | 60~75 | Star shaped progressive approach |
Maintenance Plan:
Monthly: Check the lubrication status of the swing arm pivot
Every 6 months: Helium mass spectrometry leak testing
Every 5 years: Replace the main sealing component (original factory repair kit)
Delivery date reference:
Standard model: 8-12 weeks
Customized model: 14-18 weeks
Through SEMI F47 (Voltage Transient Immunity)
Compliant with ASME BPE-2019 Bioprocess Standards
CE/PED 2014/68/EU certification
ISO 15848-1 Low Leakage Certification
Product Code 16248-PH41Product Code 16250-TA21Product Code 16254-PA48Product Code 16246-JA21
Product Code 16246-PA48 Product Code 16251-JA41 Product Code 16248-PA21 Product Code 16255-JA28
Product Code 16252-PA28 Product Code 16255-JA21 Product Code 16252-JA41 Product Code 16252-PA21
Product Code 16246-TA48 Product Code 16250-PA21 Product Code 16246-PA41 Product Code 16250-JA41
Product Code 16254-PA41 Product Code 16248-PA28 Product Code 16246-TA41 Product Code 16250-JA48
Product Code 16250-PA28 Product Code 16248-PA41 Product Code 16254-JA41 Product Code 16251-JA28
Product Code 16248-PA48 Product Code 16250-TA41 Product Code 16248-JA21 Product Code 16246-JA48
Product Code 16246-PA28 Product Code 16251-JA21 Product Code 16252-JA28 Product Code 16252-PA48
Product Code 16255-JA41 Product Code 16252-JA21 Product Code 16252-PA41 Product Code 16246-TA28
Product Code 16250-PA48 Product Code 16250-TA48 Product Code 16248-JA28 Product Code 16246-JA41
Product Code 16250-PA41 Product Code 16246-PA21 Product Code 16246-TA21 Product Code 16250-JA21
Product Code 16250-JA28