Swiss VAT High Vacuum Control Swing Valve 65.5 Series

NegotiableUpdate on 05/13

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Overview

The Swiss VAT high vacuum control swing valve 65.5 series is an ideal choice for high process pressure, low flow corrosive etching applications. The 65.5 high vacuum control swing valve can provide highly controllable flow conductivity spectra. Due to its smooth opening and closing motion, the particle count and particle generation level are extremely low, which is also its main characteristic. $r $n $r $n This valve is designed for harsh processes, such as corrosive etching and cleaning applications in semiconductor production processes, where highly controllable conductivity spectra are required when the initial controllable conductivity is low.

Product Details

Swiss VAT High Vacuum Control Swing Valve 65.5 Series

The 65.5 high vacuum control swing valve can provide highly controllable flow conductivity spectrum. Due to its smooth opening and closing motion, the particle count and particle generation level are extremely low, which is also its main characteristic.

This valve is designed for harsh processes, such as corrosive etching and cleaning applications in semiconductor production, where highly controllable conductivity spectra are required when the initial controllable conductivity is low.

The DN of the 65.5 high vacuum control swing valve is 250 mm (10 '), which can control the minimum flow conductivity to only 2 ls-1. Due to the excellent data processing capability of the 32-bit driver controller, it can increase the control of conductance to a very fine level. In addition, faster driving can be provided as the processing speed of sensors and control commands is faster compared to an equivalent 16 bit controller. The various standard port connectors on the controller can be easily accessed through a personal computer or connected to a process control unit.

The pendulum valve plate mechanism adopts an extremely sturdy design, ensuring that it can resist any process by-products. To reduce seal wear and avoid particle generation, the opening and closing movements are separated. The first stage flow is achieved by vertical movement away from the valve seat, and then the flow is increased by moving the pendulum valve plate in horizontal movement. Due to the excellent controllability of valve plate movement, the preset movement sequence can be precisely adjusted according to process requirements. To ensure a sealed closure, a special pressure rod is used to press the valve plate onto the valve seat. This ensures even distribution of sealing pressure in all areas of the valve plate.

With its compact design and direct installation options, as well as various other design options, the 65.5 series is easy to integrate into various vacuum processes.

The 65.5 high vacuum control swing valve is made of aluminum or hard anodized aluminum, with ISO-F and JIS standard flange connectors. It can integrate customer specified flanges and also serve as a heater for valves operating at temperatures up to 120 ℃.

1. Valve
2. Drive shaft
3. Dual axis drive
4. Drive feedthrough seal
5. Lock seal

Features:

Provide reliable isolation in harsh process environments
Low impact operation, low particle generation
Process inertness - extremely low residual gas release (residual gas analyzer)
Fast and adjustable operation
Pressure controller on equipment
Optional sensor power supply only requires one power supply

Advantages:

Pressure control performance
Fast running, almost particle free
Adjustments can be made according to process requirements

Technical Specifications

size		DN 250 (10')
drive		Integrated pressure controller with servo drive
Valve body material		Aluminum or hard anodized aluminum
feedthrough component		Rotating feedthrough component
Standard flange		ISO-F, JIS
Leakage rate valve body	aluminium Hard anodized aluminum	< 1 × 10-9mbar ls-1 < 1 × 10-5mbar ls-1
Leakage rate valve seat	aluminium Hard anodized aluminum	< 1 × 10-9mbar ls-1 < 1 × 10-4mbar ls-1
pressure range	aluminium Hard anodized aluminum	1 × 10-8Mbar to 1.2 bar (absolute pressure) 1 × 10-6Mbar to 1.2 bar (absolute pressure)
Number of switches before maintenance1)	pressure control Close/Open	2 million times 50000 times
temperature	valve body controller	≤ 120 °C Maximum 50 ℃ (recommended ≤)35℃）
material	Valve body and valve plate	EN AW-6061 (3.2311) T651
	Other components	AISI 316L (1.4404, 1.4435)
	Connecting screws on the valve plate	SST A4-80、Ni-PTFE、 coating
seal	Valve cover, valve plate, valve body, feedthrough component	fluororubber
Installation location		Any location

Swiss VAT High Vacuum Control Swing Valve 65.5 Series