Swiss VAT High Vacuum Control Swing Valve 65.3 Series

NegotiableUpdate on 05/13

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Overview

The Swiss VAT high vacuum control pressure swing valve 65.3 series $r $n can optimize downstream pressure control and isolation in semiconductor and display systems $r $n65.3 control pressure swing valve sets a new standard for downstream pressure control and isolation. This series of pressure controlled swing valves is designed specifically for semiconductor and display production systems, providing a high level of controllability over a wide range of conductance. The 65.3 pressure control swing valve is equipped with a motor with integrated position control, which can provide improved functionality.

Product Details

Swiss VAT High Vacuum Control Swing Valve 65.3 Series

The 65.3 pressure control swing valve has set new standards for downstream pressure control and isolation. This series of pressure controlled swing valves is designed specifically for semiconductor and display production systems, providing a high level of controllability over a wide range of conductance. The 65.3 pressure control swing valve is equipped with a motor with integrated position control, which can provide improved functionality.

The drive controller has higher 32-bit data processing capabilities, providing new controllability. This means that the various positions of the pendulum valve plate can be controlled very quickly, finely, and accurately, thereby achieving very precise downstream pressure control in a very short response time. The preset motion sequence of the valve can be adjusted for speed and route based on various constantly changing process parameters. The pressure controlled swing valve can also prevent particle release. The optimized damping closing motion of the valve plate can avoid the common impact and vibration of traditional valves. The closing of the pressure control swing valve is smooth and unobstructed, with almost no noticeable closing or opening. The valve plate provides very precise mechanical guidance, ensuring contactless airflow control during reciprocating motion and achieving uniform sealing in all areas of sealing motion.

The 65.3 pressure control swing valve has been installed in hundreds of demanding applications under various process conditions, proving its reliability and performance. 65.3 Control pressure swing valve is still an ideal choice for retrofitting existing systems.

The size of the 65.3 pressure control swing valve is DN 100-350 mm (4 '-14'), made of aluminum or hard anodized aluminum, with ISO-F and JIS standard flange connections. It can be integrated with customized flanges or used as a direct installation option. The standard sealing material is fluororubber, and other materials can be used according to requirements.

The controller can use special control algorithms (adaptive, fixed PID, upstream, soft extraction). Various standard ports on the controller can be easily accessed through a personal computer or connected to a process control unit (PCU). The dedicated Control Performance Analyzer (CPA) software can easily calibrate the 65.3 pressure swing valve and simplify maintenance plans

瑞士VAT高真空控压摆阀65.3系列

Features:

Fast and accurate pressure control
No impact operation: no particle generation
Improve process stability: can control all flow rates and pressures
32-bit integrated pressure regulator (IC2) with control performance analyzer (CPA)
Plug and play transformation: No need for calibration or matching

Advantages:

Reliability, accuracy, and speed
Extended maintenance cycle
Low operating costs

size		DN 100 (4'), DN 160 (6'), DN 200 (8'), DN 250 (10'), DN 320 (12'), DN 350 (14')
drive		Stepper motor with integrated pressure controller
Valve body material		Aluminum: Aluminum or hard anodized aluminum
feedthrough component	drive sealing ring	Rotating feedthrough component Axis feedthrough component
Standard flange		ISO-F, JIS
Leakage rate valve body	aluminium Hard anodized aluminum	< 1 × 10-9mbar ls-1 < 1 × 10-5mbar ls-1
Leakage rate valve seat	aluminium Hard anodized aluminum	< 1 × 10-9mbar ls-1 < 1 × 10-4mbar ls-1
pressure range	aluminium Hard anodized aluminum	1 × 10-8Mbar to 1.2 bar (absolute pressure) 1 × 10-6Mbar to 1.2 bar (absolute pressure)
Number of switches before maintenance1)	pressure control Close/Open	1 million times 200000 times
temperature	valve body controller	≤ 120 °C Maximum 50 ℃ (recommended ≤ 35 ℃)
material	Valve body and valve plate	EN AW-6061 (3.3211)
	sealing ring	EN AW-6061 (3.3211), AISI 305 (1.4303), AISI 420C (1.3541), AISI 631 (1.4568)
	Other components	AISI 316L (1.4404, 1.4435), AISI 440 (1.4122), AISI 301 (1.4310), AISI 316 Ti (1.4571), AISI 304 (1.4301)
seal	Valve cover, valve plate Valve body feedthrough component	Fluororubber (fluorinated elastomer)
Installation location		Any location

Swiss VAT High Vacuum Control Swing Valve 65.3 Series

Product Code 65350-JAUH Product Code 65346-PHGK Product Code 65350-JAUF Product Code 65350-JAUE Product Code 65350-PACE

Product Code 65346-PHGN Product Code 65340-JAGQ Product Code 65340-JAGN