SPIN300x high-quality substrate spin coating machine

NegotiableUpdate on 06/26

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

Online Consult

Overview

The SPIN300x high-quality substrate spin coating machine can achieve precise and repeatable process control. Its material is natural polypropylene (NPP) or polytetrafluoroethylene (PTFE) with chemical resistance. This fully validated model has launched a new version, divided into standard and premium versions. It is very suitable for handling various substrates, including circular substrates with a maximum diameter of 200 millimeters or substrates with a size of 150 A 150mm square sample.

Product Details

SPIN300x 高质量基底旋涂机

design

The shell and drainage design make it easy to switch between desktop and built-in models. Modular design enables users to upgrade equipment through various accessories, simplifying allocation operations and overall processing flow.

Liquid filtration trap

The SPINx series is equipped with a liquid filtration trap to protect critical components of the spin coating machine. It can collect all liquids or corrosion inhibitors that enter the vacuum pipeline through the processing chamber or vacuum chuck into a liquid container. The container can be viewed through the opening on the casing of the spin coating machine for easy maintenance.

Automatic lid

The lid can be automatically opened and closed through a user interface or a foot pedal (ideal for glove box environments). In addition, the lid can be automatically opened at the final step of the process recipe.

Motor returns to zero position

The new SPINx series can set the motor return to zero position, making it easy to integrate into robot control/automation environments.

Hardware specifications:

Liquid filtration trap
Automatic lid (advanced version can also be controlled by foot pedal)
Programmable motor returns to zero position
Central injection bracket for syringes or dispensing nozzles
Lid lock and vacuum sensor for user safety
Large size (detachable) touch screen display
USB port for storing recipes and conducting software updates on a USB drive
Driver unit specification: Indirect brushless drive unit, up to 12000 revolutions per minute; High acceleration and precision, 1-30000 revolutions per minute; Clockwise/counterclockwise rotation and puppy mode; Design that can switch between desktop and built-in models

Applicable process:

coating
clean
Rinse/Dry
develop
etching
PDMI and other processes

SPIN300x 高质量基底旋涂机