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Wechsler Nanosystems GmbH, Germany
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Wechsler Nanosystems GmbH, Germany

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    Room 2802, Building T4, Yinxuan Center Building, Bao'an District, Shenzhen

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Model 656 Ultraviolet Intensity and Energy Meter

NegotiableUpdate on 06/26
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Overview

The Model 656 UV Intensity and Energy Meter is designed and manufactured by OAI. $r $n is a 656 ultraviolet intensity and energy meter suitable for all wafer stepper lithography machines.

Product Details

Model 656 紫外线光强与能量计


Model 656 Ultraviolet Intensity and Energy Meter

For over half a century, OAI has been used in the field of UV intensity and energy measurement instruments for reliable and precise calibration control of photolithography processes in industries such as semiconductors, microelectromechanical systems (MEMS), wafer packaging, and wafer bump manufacturing. The new 656 model is a UV exposure analyzer designed specifically for contact/proximity mask aligners and flood exposure systems. This instrument can store up to 400 exposure readings and is equipped with Ethernet and USB interfaces for downloading recorded measurement data. The light intensity range can reach up to 2000 milliwatts per square centimeter. The optional wavelengths for the probe include 220 nanometers, 248 nanometers, 260 nanometers, 310 nanometers, 325 nanometers, 365 nanometers, 380 nanometers, 400 nanometers, 420 nanometers, 436 nanometers, and 540 nanometers. OAI has a comprehensive calibration laboratory to ensure the performance, quality, and reliability of our instruments. The 656 instrument can be traced back to the National Institute of Standards and Technology (NIST) standards in the United States and complies with the EU RoHS 2 (Directive on the Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment, Second Edition) and CE (European Conformity Assessment) certification requirements.

Used in conjunction with contact/proximity aligners

Extremely precise and reliable

Easy to download measurement data

Range up to 2000 milliwatts per square centimeter

Up to 400 sets of measurement data can be stored

Compliant with ROHS2 (Directive on the Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment, Second Edition) and CE (European Conformity Assessment) standards, highlighting the product's environmental and compliance attributes, used to illustrate instrument adaptation scenarios, performance advantages, and compliance.

Specification for Model 656 UV Intensity and Energy Meter

Instrument specifications

User interface: Touch screen

Computer interface: Optional Ethernet and USB interfaces for downloading recorded measurement data

Power supply: Battery powered, using 3.7V rechargeable lithium-ion battery with charging protection

Charger power supply: 110-240V AC voltage

Display settings: dual screen

Set Screen - Ethernet Address, Date, and Time

Run screen - wavelength, light intensity, time, dose, probe temperature, probe type, deviation percentage, serial number, calibration expiration date, battery status, probe serial number, and charger status

Storage capacity: up to 400 readings

Light intensity range: up to 2000mW/cm ²

Light intensity resolution: 0.01mW/cm ²

Dose range: up to 1000J/cm ²

Dose resolution: 0.01mJ/cm ²

Time range: up to 9999 seconds

Time resolution: 0.0001 seconds

Minimum dose exposure: 25 milliseconds

Size: 14 inches x 8.25 inches x 3.5 inches

Weight: 3.5 pounds

Working environment: 15 ℃ -40 ℃

Compliance: Compliant with ROHS2 and CE (Electromagnetic Compatibility and Safety) standards

Probe specifications

Probe detector: silicon photodiode

可选波长: 220nm、248nm、254nm、260nm、310nm、325nm、365nm、380nm、400nm、420nm、436nm 和 540nm

Filter: Multi layer absorption/dielectric filter

Light intensity range: up to 2000mW/cm ²

Interchangeability: Any 656 probe can be used in conjunction with any 656 instrument

Compliance: Compliant with ROHS2 and CE (Electromagnetic Compatibility and Safety) standards