- Phone
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Address
Room 2802, Building T4, Yinxuan Center Building, Bao'an District, Shenzhen
Wechsler Nanosystems GmbH, Germany
Room 2802, Building T4, Yinxuan Center Building, Bao'an District, Shenzhen

For over half a century, OAI has been used in the field of UV intensity and energy measurement instruments for reliable and precise calibration control of photolithography processes in industries such as semiconductors, microelectromechanical systems (MEMS), wafer packaging, and wafer bump manufacturing. The new 656 model is a UV exposure analyzer designed specifically for contact/proximity mask aligners and flood exposure systems. This instrument can store up to 400 exposure readings and is equipped with Ethernet and USB interfaces for downloading recorded measurement data. The light intensity range can reach up to 2000 milliwatts per square centimeter. The optional wavelengths for the probe include 220 nanometers, 248 nanometers, 260 nanometers, 310 nanometers, 325 nanometers, 365 nanometers, 380 nanometers, 400 nanometers, 420 nanometers, 436 nanometers, and 540 nanometers. OAI has a comprehensive calibration laboratory to ensure the performance, quality, and reliability of our instruments. The 656 instrument can be traced back to the National Institute of Standards and Technology (NIST) standards in the United States and complies with the EU RoHS 2 (Directive on the Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment, Second Edition) and CE (European Conformity Assessment) certification requirements.
Used in conjunction with contact/proximity aligners
Extremely precise and reliable
Easy to download measurement data
Range up to 2000 milliwatts per square centimeter
Up to 400 sets of measurement data can be stored
Compliant with ROHS2 (Directive on the Restriction of the Use of Certain Hazardous Substances in Electrical and Electronic Equipment, Second Edition) and CE (European Conformity Assessment) standards, highlighting the product's environmental and compliance attributes, used to illustrate instrument adaptation scenarios, performance advantages, and compliance.
Instrument specifications
User interface: Touch screen
Computer interface: Optional Ethernet and USB interfaces for downloading recorded measurement data
Power supply: Battery powered, using 3.7V rechargeable lithium-ion battery with charging protection
Charger power supply: 110-240V AC voltage
Display settings: dual screen
Set Screen - Ethernet Address, Date, and Time
Run screen - wavelength, light intensity, time, dose, probe temperature, probe type, deviation percentage, serial number, calibration expiration date, battery status, probe serial number, and charger status
Storage capacity: up to 400 readings
Light intensity range: up to 2000mW/cm ²
Light intensity resolution: 0.01mW/cm ²
Dose range: up to 1000J/cm ²
Dose resolution: 0.01mJ/cm ²
Time range: up to 9999 seconds
Time resolution: 0.0001 seconds
Minimum dose exposure: 25 milliseconds
Size: 14 inches x 8.25 inches x 3.5 inches
Weight: 3.5 pounds
Working environment: 15 ℃ -40 ℃
Compliance: Compliant with ROHS2 and CE (Electromagnetic Compatibility and Safety) standards
Probe specifications
Probe detector: silicon photodiode
可选波长: 220nm、248nm、254nm、260nm、310nm、325nm、365nm、380nm、400nm、420nm、436nm 和 540nm
Filter: Multi layer absorption/dielectric filter
Light intensity range: up to 2000mW/cm ²
Interchangeability: Any 656 probe can be used in conjunction with any 656 instrument
Compliance: Compliant with ROHS2 and CE (Electromagnetic Compatibility and Safety) standards