ROHS Metal Composition Analyzer

　　ROHS Metal Composition AnalyzerSXES: Soft X-Ray Emission Spectrometer achieves high energy resolution by combining a newly developed diffraction grating with a high-sensitivity X-ray CCD camera.

Like EDS, it can be detected in parallel and analyzed with a high energy resolution of 0.3 eV (Al-L reference at the Fermi edge), surpassing the energy resolution of WDS.

　　ROHS Metal Composition AnalyzerSystem Introduction: The latest developed and designed spectroscopic system can simultaneously obtain spectra of different energies without moving diffraction gratings or detectors (CCD). Moreover, due to its high energy resolution, it is also possible to collect state analysis distribution maps

Comparison of spectra of titanium nitride samples in various spectroscopic methods using SXES, WDS, and EDS

Even in WDS analysis, the spectral peaks of titanium nitride overlap, requiring the use of deconvolution mathematical methods for processing. As shown in the figure below, SXES has a high energy resolution.

　　comparison table

feature	SXES	EPMA(WDS)	EDS
resolution	0.3 eV (Al-L at Fermi edge)	8 eV ( FWHM@Fe-K ）	120-130 eV ( FWHM@Mn-K ）
Chemical binding state analysis	can	Okay (mainly light elements)	cannot
Parallel detection	can	cannot (But the range of the number of spectrometers is sufficient)	can
Spectral crystals and detectors	Diffraction grating+CCD	Spectral crystal+proportional counter tube	SDD
Detector cooling	Peltier cooling	No need	Peltier cooling
Detection limit (with B as reference value)	20ppm	100ppm	5000ppm

Analysis Example of Lithium ion Secondary Battery (LIB)

Can observe the charging amount of LIB

　　Spectrum of Li-K sample after fully charged

Explanation: Due to theoretical reasons, the detection of lithium oxide is difficult

Test examples of light elements

Example of SXES testing carbon compounds

Can test different types of diamonds, graphite, and polymers.

Test examples of various nitrogen compounds. Nitrogen can also be analyzed for its chemical binding state based on waveform analysis. The waveforms of nitrates and nitrides are different, and the waveform of ammonium salts that are susceptible to electron beam damage can also be observed.