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Nanjing Qinsi Technology Co., Ltd
Multi purpose sample cleaning and storage chamber
NegotiableUpdate on 02/04
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Overview
By selecting external accessories such as EM-KLEEN remote control plasma source and/or TEM sample rod adapter, the multi-purpose chamber can be configured for different applications. The EM-KLEEN remote plasma source can generate oxygen and hydrogen radicals using air, oxygen, or hydrogen for sample cleaning and surface activation. If the chamber is equipped with a TEM sample rod adapter, a total of six TEM sample rods from Thermo Fisher, JEOL, and Hitachi can be accepted and cleaned, and it can also be used as a sample rod vacuum storage station. Of course, the EM-KLEEN plasma source can also be removed and installed on vacuum chambers such as SEM, FIB, or XPS
Product Details
Multi purpose sample cleaning and storage chamber——TEM&SEMSample Cleaning and Storage Plan
By selecting external accessories such as:EM-KLEENRemote control of plasma source and/perhapsTEMSample rod adapter, multi-purpose chamber can be configured for different applications.EM-KLEENRemote plasma sources can use air, oxygen, or hydrogen to generate oxygen and hydrogen radicals for sample cleaning and surface activation. If the chamber is equipped withTEMThe sample rod adapter can be accepted and cleaned fromThermo Fisher、JEOLandHitachiThere are a total of six of themTEMThe sample rod can also be used as a vacuum storage station for sample rods. of course,EM-KLEENThe plasma source can also be removed and installed ontoSEM、FIBperhapsXPSWait for the vacuum chamber.
configurationone
Multi purpose chamber configurationEM-KLEENPlasma source.
Application:EM-KLEENRemote plasma sources use indoor air, oxygen, or hydrogen as processing gases to generate oxygen or hydrogen free radicals. The sample to be cleaned can be loaded from the top glass door.EM-KLEENThe plasma source can also be removed and installed ontoSEM、FIBandXPSClean the vacuum chamber of the system.
configurationtwo
Multi purpose chamber configuration with plasma source andTEMSample rod adapter.
Application:EM- KLEENRemote plasma source is used forSEM&TEMSample cleaning. Samples can be loaded through the top glass door or inserted through an adapterTEMSample rod.EM- KLEENThe plasma source can also be removed and installed inSEM、FIBandXPSOn the system, it is used for vacuum chamber cleaning. The chamber can be evacuated using an oil-free scroll pump or a turbo molecular pump workstation.
configurationthree
Install on the chamberTEMSample rod adapter, can be used as a sample&Sample rod vacuum storage chamber. The chamber can be evacuated by an oil-free scroll pump or a turbo molecular pump workstation. A total of six can be placedTEMSample rod. It can be placedJEOL、HitachiandThermo FisherofTEMSample rod.
TEMSample rod vacuum storage station
TEMThe sample rod vacuum pump station can store up to under vacuum conditions6individualTEMSample rod, helps deflate the sample and sample rod, removes water vapor condensation, and keeps the sample and sample rod clean. It can also be used for leak detection of sample rods.
Instrument features:
Each device has a total of6A storage unit.
Each storage unit can be independently drained through an electromagnetic valve. When one of the sample rods is removed, the remaining units can still remain in a vacuum state.
Multiple storage systems can be connected in a chain and share a vacuum pump. It can also be combined withTergeo-EMThe system shares a vacuum pump.
Optional oil-free dry vortex pump or turbine pump station.
The vacuum pump is separated from the storage station, making it easy to maintain and repair when necessary.
The vacuum pipeline is designed with all metal pipes, which can minimize exhaust and reduce pollution to the greatest extent possible.
A stable operating temperature design slightly above room temperature is beneficial for faster deflation of the sample rod.
AmericaPIEThe company is a leader in modern plasma cleaning technology, with products including:TergeoSeries desktop plasma cleaning instrument（Tergeo、Tergeo-PlusandTergeo-EM）Remote plasma cleaning instrument（EM-KLEEN、SEMI-KLEEN quartzandSEMI-KLEEN sapphire）If needed, please contact us.
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