MKS RF power supply RD5060Z 60MHz 2000W

MKS RF power supply RD5060Z 60MHz 2000WRF GeneratorIt is an excellent RF generator with reliable performance and stable output capability that has been verified on site. It has demonstrated excellent process stability and output control capability in actual machine validation. This type of RF power supply can achieve precise control of RF output and is widely used in semiconductor process sputtering CVD、PECVD、 In etching and other processes, it has excellent performance. The RD5060Z RF power supply has excellent film-forming ability. In semiconductor thin film technology, it has the advantages of fast film-forming speed, high efficiency, and good quality, which can improve production line efficiency and product yield to a certain extent. It has a wide range of applications.

MKS RF power supply RD5060Z 60MHz 2000WRF GeneratorParameter Specifications

Equipment brand: MKS

Equipment model: RD5060Z

AC power input: 3 phases~, 480V, 15A

RF output: DUAL 2.0KW, 60MHz

通讯接口： CEX In/Out，Profibus，EtherNet，Sync In/Out，Reserved，RS-232C

Equipment heat dissipation: water-cooled heat dissipation

Equipment weight: 445kg, 98lbs