AE RF power supply RFG 3001 13.56MHz 3KW

AE RF power supply RFG 3001 13.56MHz 3KWRF GeneratorIt is a high-performance RF power supply with excellent process stability and control capability that has been verified for a long time. It can achieve precise control of RF output and has excellent performance in semiconductor sputtering, etching, CVD, PECVD and other process technologies.The AE RFG series RF power supply has excellent process stability and RF control capability, which can achieve precise control of RF output. The RFG series RF power supply has good film-forming ability, fast film-forming speed, and high efficiency. It has a wide range of applications in semiconductor thin film processes and can improve production line efficiency and product yield to a certain extent. This type of RF power supply adopts a compact design, which is small and convenient, and can reduce the cost of use for customers.

AE RF power supply RFG 3001 13.56MHz 3KWRF GeneratorParameter Specifications

Equipment brand: AE (Advanced Energy)

Equipment model: RFG 3001

AC power input: 3 phases~,~28V/PE, 50/60Hz

RF output: 13.56MHz, 3000W, 387V~

Communication interface: Control, CEX

Equipment heat dissipation: water-cooled heat dissipation

Water cooling inlet demand: MAX inlet pressure 6.9Bar/690kPa