AE RF power supply Cesar 0230 2MHz 3000W

AE RF power supply Cesar 0230 2MHz 3000WRF GeneratorIt is an excellent RF generator with reliable performance and stable output capability that has been verified on site. It has demonstrated excellent process stability and output control capability in actual machine validation. This type of RF power supply can achieve precise control of RF output and is widely used in semiconductor process sputtering CVD、PECVD、 In etching and other processes, it has excellent performance. The Cesar series RF power supply has excellent film-forming ability. In semiconductor thin film technology, it has the advantages of fast film-forming speed, high efficiency, and good quality, which can improve production line efficiency and product yield to a certain extent. It has a wide range of applications.

AE RF power supply Cesar 0230 2MHz 3000WRF GeneratorParameter specifications:

Equipment brand: AE (Advanced Energy)

Equipment model: Cesar 0230

AC power input: 3 phases~+PE, 200V~, 50/60Hz, 20.0A

RF output: 3000W,~615V, 2MHz

Communication interface: RS-232, User Port, Matchbox, Diagnostic

Equipment heat dissipation: air-cooled+water-cooled heat dissipation