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Jiangsu Shenzhou Semiconductor Technology Co., Ltd
MKS RF power supply 53-S30-64 63.87MHz 18KW
NegotiableUpdate on 05/15
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Overview
The MKS RF power supply 53-S30-64 63.87MHz 18KW RF Generator is a high-performance RF power supply with excellent process stability and control capabilities that has been verified on site for a long time.
Product Details
MKS RF power supply 53-S30-64 63.87MHz 18KW RF GeneratorIt is an excellent RF generator with reliable performance and stable output capability that has been verified on site. It has demonstrated excellent process stability and output control capability in actual machine validation. This type of RF power supply can achieve precise control of RF output and is widely used in semiconductor process sputtering CVD、PECVD、 In etching and other processes, it has excellent performance. The RD5060Z RF power supply has excellent film-forming ability. In semiconductor thin film technology, it has the advantages of fast film-forming speed, high efficiency, and good quality, which can improve production line efficiency and product yield to a certain extent. It has a wide range of applications.
MKS RF power supply 53-S30-64 63.87MHz 18KW RF Generator parameter specifications
Equipment brand: MKS
Equipment model: 53-S30-64
AC power input: 3 phases~, 380/400 VAC ± 10%, 16A, 50/60Hz
RF output: 63.87MHz, 18KW Pulsed, 540Watts, 50 Ω
Communication interface: Remote, RS-232C
Equipment cooling: air-cooled cooling
