FS Pro Semiconductor Parameter Testing System

FS Pro Semiconductor Parameter Testing SystemProduct Introduction

FS-ProThe semiconductor parameter testing system is a comprehensive and flexible electrical characteristic analysis equipment for semiconductor devices, which realizes current and voltage in one system(IV)Testing, capacitor voltage(CV)Testing, pulse typeIVTesting, arbitrary linear waveform generation and measurement, high-speed time-domain signal acquisition, and low-frequency noise testing capabilities. Almost all low-frequency characteristics of semiconductor devices can be characterized inFS-ProCompleted in the testing system. Its comprehensive and powerful parameter testing and analysis capabilities have greatly accelerated the development and evaluation process of semiconductor devices and processes, and can be compared with conceptual analysis 9812 Seamless integration of series noise testing system, fast and efficientDCThe testing ability has been further improved 9812 Efficiency of noise testing for series products.

FS Pro Semiconductor Parameter Testing SystemIt is a comprehensive and flexible semiconductor device electrical characteristic analysis device.

• In a system, current voltage (IV) testing, capacitance voltage (CV) testing, pulse IV testing, arbitrary linear waveform generation and measurement, high-speed waveform generation and acquisition, and low-frequency noise testing capabilities have been implemented. Almost all low-frequency characteristic characterizations of semiconductor devices can be completed in the FS Pro testing system.

• The comprehensive and efficient parameter testing and analysis capabilities greatly accelerate the development and evaluation process of semiconductor devices and processes, and can be seamlessly integrated with the Kirin 9812 series noise testing system.

• Adopting the industrial universal PXI modular hardware architecture, the system configuration is flexible and has strong scalability.

• The built-in professional testing software LabExpress provides rich testing presets and * data processing functions.

• LabExpress software supports both automated and parallel measurement, which can further improve testing efficiency.

• Widely used in various research fields such as semiconductor devices, LED materials, two-dimensional material devices, metal materials, new materials and device testing, device reliability, etc.

• Product Application

• Testing of New Materials and Devices

• Reliability testing of semiconductor devices

• Ultra short pulse testing of semiconductor devices

• Non destructive testing and inspection of semiconductor devices

• Testing of optoelectronic devices and microelectromechanical systems

• Testing of ultra-low frequency noise in semiconductor devices

Main specifications and parameters:

• Wide range: 200V voltage, 1A DC current
• High precision: 30fA accuracy, 0.1fA sensitivity
• Noise testing bandwidth: High precision up to 100kHz, ultra-low frequency up to 40Hz
• Noise testing speed:<10s/bias (frequency resolution greater than 0.5Hz)
• Built in pulse test: 200V voltage, 3A pulse current, minimum 50 μ s pulse width
• Built in CV test: 200V/10kHz, the lowest can be measured up to 20fF
• External CV testing module: 40V/2MHz (high-precision type); 40V/10MHz (high bandwidth type)
• High speed time-domain signal acquisition: minimum sampling time<1 μ s, 100000 data points
• Minimum impedance for noise testing: 500 Ω
• Noise test resolution: Lowest 2e-28A ²/Hz
• Noise testing frequency resolution: high-precision 0.1Hz, ultra-low frequency 0.001Hz
• High precision and fast waveform generation and measurement kit
• 2-channel, SMA interface
• Quick IV test: ± 10V voltage, maximum 10mA current
• SMU Direct: ± 25V voltage input, maximum 100mA current
• 100MSa/s sampling rate, recommended minimum pulse width up to 130ns

  
  

Software features

The FS Pro series has built-in LabExpress measurement software with * testing and scoring capabilities

Analysis function, the software provides a friendly graphical user interface and flexible settings

Ding has the following main functions:

Complete support for DC, pulse, transient, capacitance, noise testing, and any waveform

Occurrence and measurement function

Support long-range stress testing, as well as HCI, BTI, TDDB, GOI (V-Ramp,

J-Ramp reliability testing

The built-in common device testing presets can greatly improve the efficiency of testing settings and help

Novice operators can quickly complete the test

*The custom setting function of allows for flexible editing of electrical signals

Built in * data processing capability can be tested and directly expanded for device characteristic analysis

Various data storage methods, exporting data for subsequent analysis and research by users, as well as direct access

Import modeling software BSIMProPlus and MeQLab for model extraction

And characteristic analysis

LabExpress Professional Edition supports control of mainstream probe stations and matrix switching devices

Manufacturing, supporting wafer mapping and parallel testing to achieve automatic testing functions, further

Improve testing efficiency