AE RF power supply RFG 5500 MN3155051-015

AE RF power supply RFG 5500 MN3155051-015,5000W 13.56MHz,ASIS, available, in good condition, can ship.PN：27-115617-00; MN：3155051-015。

AE RF power supply RFG 5500 MN3155051-015It is a high-performance RF power supply with excellent process stability and control capability that has been verified for a long time. It can achieve precise control of RF output and has excellent performance in semiconductor sputtering, etching, CVD, PECVD and other process technologies. The AE RFG series RF power supply has excellent process stability and RF control capability, which can achieve precise control of RF output. The RFG series RF power supply has good film-forming ability, fast film-forming speed, and high efficiency. It has a wide range of applications in semiconductor thin film processes and can improve production line efficiency and product yield to a certain extent. This type of RF power supply adopts a compact design, which is small and convenient, and can reduce the cost of use for customers.

RFG 5500 parameter specifications

Equipment brand: AE (Advanced Energy)

Equipment model: RFG 5500

AC power input:~28V, 3 phases~, 50/60Hz, 10.0kW

RF output: 13.56MHz, 5000W

Equipment heat dissipation: water-cooled heat dissipation