AE RF power supply Paramount MF 15002 15KW

AE RF power supply Paramount MF 15002 15KW1.8-2.17MHz RF GeneratorIt is a high-performance RF power supply with stable output and control capabilities that has been verified on site for a long time, and has demonstrated excellent process stability in actual operation. The AE Paramount series RF power supply has excellent film-forming ability and is widely used in semiconductor thin film processes. This type of RF power supply has fast film-forming speed and high efficiency, which can improve production line efficiency and product yield to a certain extent. The MF 15002 RF power supply can achieve precise control of RF output in semiconductor sputtering processes CVD、PECVD、 There are many applications and good performance in etching technology.

AE RF power supply Paramount MF 15002 15KWParameter Specifications

Equipment brand: AE (Advanced Energy)

Equipment model: Paramount MF 15002

AC power input: 3 phases~+PE, 200~28V, 50/60Hz, 70A

RF output: 15KW, 1.8~2.17MHz, ＜ 1000Vrms

通讯接口： Sync In/Out，CEX In/Out，Match，User，Serial，ENET

Equipment heat dissipation: water-cooled heat dissipation

Water cooling inlet demand: MAX inlet pressure 6.9Bar/690kPa