5-inch rotary CVD tube furnace

Furnace structure

• Adopting a double-layer shell structure with an air-cooled system
• Using high-purity alumina as furnace material can greatly reduce energy loss
• The DC motor drives the quartz tube to rotate at a speed of 0-10 RPM
• The furnace body can be tilted at an angle of 30 °
• The furnace body is designed as an open type for easy operation and rapid cooling of the sample

heating zone

• Total length of three temperature zones: 600mm
• Temperature zone 1: 150 mm (6 ')
• Temperature zone 2: 300mm (12 ')
• Temperature zone 3: 150 mm (6 ')
• The constant temperature zone is 450mm @+/-2 ℃ (with the same temperature set for all three zones)

• The instrument contains a quartz tube
• 尺寸： 130 mm O.D. x 120 mm I.D. x 1200 mm L + 60O.DMm (diameter at both ends)
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• The instrument includes a set of stainless steel vacuum flanges (with stainless steel needle valves installed on them)

joint

• Inlet end interface: card sleeve interface with a diameter of 6.35
• Exhaust end connector: Φ 12 pagoda mouth connector

Operating Temperature

• Continuous operating temperature: 1100 ℃
• Maximum working temperature: 1200 ℃<1 hour

Temperature Control System

• Three temperature zones are independently controlled by three temperature control systems, all of which are adjusted using PID method and can set 30 temperature rise and fall programs
• There is an RS485 interface installed on the furnace body, and a temperature control module can be selected. The furnace body temperature is controlled by a computer

thermocouple

• Three Omega K-type armored thermocouples
• 

真空泵和冷井

• Equipped with a bipolar rotary vane vacuum pump, on which an oil mist filter is installed
• You can choose a cold well to prevent sediment damage to the vacuum pump during the experiment
• 

gas supply system

• 4-channel precision gas control system, using mass flow meter and touch screen control, can simultaneously introduce 1-4 different gases
• Attention: If flammable and explosive gases are introduced, the equipment must be installed in a fume hood
• 

Zui High Power

4KW

voltage

208-240V single-phase (requires 30 A air switch)

warranty

One year warranty period, lifetime maintenance (excluding furnace tubes, sealing rings, and heating elements)

quality certification

• CE Certification
• All electrical components (>24V) are certified by UL/MET/CSA
• If the customer incurs certification fees, our company guarantees that a single device will pass the German TUV certification or CAS certification
• 

Net weight

130kg

Application precautions

• This set of equipment can be used in conjunction with our company's continuous feeding device to achieve the effect of continuous feeding
• 

Warning

• The pressure inside the furnace tube cannot exceed 0.02MPa
• Due to the high internal pressure of the gas cylinder, a pressure reducing valve must be installed on the cylinder when introducing gas into the furnace tube. It is recommended to purchase a pressure reducing valve from our company, which has a range of 0.01MPa-0.1MPa and can be used more accurately and safely
• When the temperature of the furnace body is higher than 1000 ℃, the furnace tube cannot be in a vacuum state. The pressure inside the furnace tube should be equivalent to atmospheric pressure and maintained at atmospheric pressure
• The gas flow rate entering the furnace tube should be less than 200SCCM to avoid the impact of cold large airflow on the heated quartz tube
• The long-term use temperature of quartz tube is less than 1100 ℃
• For the experiment of sample heating, it is not recommended to close the exhaust valve and inlet valve at the flange end of the furnace tube. If it is necessary to close the gas valve to heat the sample, it is necessary to constantly pay attention to the reading on the pressure gauge. If the pressure reading is greater than 0.02 MPa, the vent valve must be opened immediately to prevent accidents (such as furnace tube rupture, flange flying out, etc.)