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Z-axis small volume nano displacement stage piezoelectric ceramic nano stage

NegotiableUpdate on 05/06
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Z-axis small volume nano displacement stage piezoelectric ceramic nano stage NM-005 NM-010 customized price contact

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Product Description: How to Translate

NM-005 is a Z-direction direct drive piezoelectric level shifting platform, which adopts the design principle of piezoelectric ceramic direct drive mechanism. It has the characteristics of small size, no friction, and fast response speed. Equipped with high-precision sensors, it can achieve nanometer level resolution and positioning accuracy with high reliability. The piezoelectric translation platform plays an important role in the field of precision positioning.

The fixed installation hole on the bottom platform can be selected as M3 threaded hole, which is convenient for users to install. Please indicate it when ordering. The default version of the platform has a fixed hole with a diameter of 2.2 through holes.
The stroke range is 5 μ m (closed loop).
NM-010 is a Z-direction direct drive piezoelectric level shifting platform, which adopts the design principle of piezoelectric ceramic direct drive mechanism. It has the characteristics of small size, no friction, and fast response speed. Equipped with high-precision sensors, it can achieve nanometer level resolution and positioning accuracy with high reliability. The piezoelectric translation platform plays an important role in the field of precision positioning.
The piezoelectric displacement stage can provide SGS sensor feedback or no feedback (open-loop).
For applications that require compact size, high dynamics, and sub nanometer level positioning resolution, but do not require absolute positioning accuracy and repeatability, open-loop provides an economically efficient option. In the case of controlling the piezoelectric position through external feedback sources (interferometers, vision systems, photodetectors, etc.), open-loop design versions can also be used.

Product Parameters:

model NM-005 NM-005S NM-010 NM-010S tolerance
motion axis Z Z Z Z
Integrated sensors SGS SGS
Nominal travel range (@ 0~+120V) 5μm 5 μm 10μm 10μm ±5%
Maximum travel range (@ -20~+150V) 7μm 7μm 12μm 12μm ±20%
resolution 0.05nm 0.1nm 0.1nm 0.2nm type.
Minimum moving step size 3.0nm 3.0 nm 0.4nm 0.4 nm type.
Linear error cha 0.2% 0.2% type.
Repetitive positioning accuracy (full stroke) 0.1% 0.2% type.
Angular deviation (pitch/yaw/roll) 5μrad 5μrad 5μrad 5μrad type.
bearing capacity 8N 8N 8N 8N Max.
Resonant frequency (0g) 2500Hz 2500 Hz 2300Hz 2300 Hz ±20%
Movement direction stiffness 2N/μm 2 N/μm 2N/μm 2 N/μm ±20%
Movement direction thrust/tension 12N/2N 12N /2N 12N/2N 12N /2N ±20%
drive mechanism piezoelectric ceramic piezoelectric ceramic piezoelectric ceramic piezoelectric ceramic
Working temperature range -20~+80℃ -20~+80 °℃ -20~+80℃ -20~+80 °℃ type.
Cable length 1.5m 1.5 m 1.5m 1.5 m ±10mm
Hollow size
Dimensions (length x width x height) 30×30×24mm 30×30×24mm 30×30×29.2mm 30×30×29.2mm
weight 70g 70g 80g 80g ±5%
PZT&Sensor connector LEMO LEMO LEMO LEMO
body material aluminium aluminium aluminium aluminium






























Note: All specification parameters are measured at room temperature (22 ° C ± 3 ° C). For more information, please contact us. The "-" in the table indicates not applicable.
1. The suffix "- S" indicates a closed loop with a built-in position sensor. Open loop suffix without '- S, no linear error, and no repeatability data.
2. The maximum driving voltage is -20V~+150V. For high reliability long-term use, it is recommended to use a driving voltage of 0.+120V. For larger travel, please consult. The factory has a nominal stroke.
3. Resolution refers to positioning noise. Because the piezoelectric ceramic nano positioning system has no friction, the system resolution is only limited by amplifier noise and measurement techniques. Usually measured and specified using RMS (1 σ) value.
4. It refers to the minimum step size value that can be moved by the piezoelectric platform measured by the interferometer, which is mainly determined by the DAC resolution of the piezoelectric controller. In the best case, the displacement step size value corresponding to 16 Bit is listed in the parameter table.
5. Axial load, please consult for higher loads. Note that exceeding the nominal load may cause damage to the flexible mechanism.
6. Please consult for longer cable lengths.
7. The weight of the platform does not include the weight of cables and connectors.
8. Max represents the maximum value in the tolerance; Typ. represents the standard typical data value, and the actual measurement data value will be provided in the testing report.


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