Large stroke, high-precision, compact linear piezoelectric ceramic nano stage

Large stroke, high-precision, compact linear piezoelectric ceramic nano stage NM-160 customized price, please contact

This series of nanodisplacement tables uses highly reliable multi-layer low-voltage piezoelectric stacked ceramics as driving elements, and an integrated flexible guiding system optimized by finite element method can ensure good parallel motion. Due to the use of a frictionless flexible mechanism, the piezoelectric displacement stage requires no maintenance, has no wear, and has fast response and stable performance, making it suitable for dynamic processes such as high-frequency error compensation, tracking, fast stepping, or continuous scanning.

The closed-loop version has a high-resolution strain gauge position sensor, which can achieve high-precision and repeatable motion, and can also compensate for the creep of piezoelectric ceramics. The sensor adopts a fully closed-loop bridge design. It can operate in open-loop or closed-loop control. The fixation of the piezoelectric platform is achieved through threaded holes on the moving surface and the bottom plate. To install on optical platforms or other components with standard grids, please use an adapter board. During the fastening process, excessive bending moment loads and lateral forces acting between the moving surface and the shell should be avoided, as these external forces may damage the displacement table.

Note: All specification parameters are measured at room temperature (22 ° C ± 3 ° C). For more information, please contact us. The "-" in the table indicates not applicable.

1. The suffix "- S" indicates a closed loop with a built-in position sensor. Open loop suffix without "- S", without linear error or repeatability data.

2. The maximum driving voltage is -20V~+150V. For high reliability long-term use, it is recommended to use a driving voltage of 0.+120V. For larger travel, please consult. The factory has a nominal stroke.

3. Resolution refers to positioning noise. Because the piezoelectric ceramic nano positioning system has no friction, the system resolution is only limited by amplifier noise and measurement techniques. Usually measured and specified using RMS (1 σ) value.

4. It refers to the minimum step size value that can be moved by the piezoelectric platform measured by the interferometer, which is mainly determined by the DAC resolution of the piezoelectric controller. In the best case, the displacement step size value corresponding to 16 Bit is listed in the parameter table.

5. Axial load, please consult for higher loads. Note that exceeding the nominal load may cause damage to the flexible mechanism.

6. Please consult for longer cable lengths.

7. The weight of the platform does not include the weight of cables and connectors.

8. Max represents the maximum value in the tolerance; Typ. represents the standard typical data value, and the actual measurement data value will be provided in the testing report.