- Phone
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Address
Room 707, Aiqian Building, 599 Lingling Road, Xuhui District, Shanghai, China
Shanghai Nateng Instrument Co., Ltd
Room 707, Aiqian Building, 599 Lingling Road, Xuhui District, Shanghai, China
NTT'sFZPEtched by dry methodTaform. Has excellent high durabilityXRadiation radiation, high resolution and high contrast, clear absorber patterns,S/NHigh ratio, less imaging defects,Can be ideally applied toXX-ray microscopeXRadiation and Microbeam RadiationXRadiographic imaging.
In addition, it also provides software forXRadiation and extreme ultraviolet(EUV、XUV)In the fieldTaPattern/SiNMembrane typeFZPandAuBoard pattern/SiNMembrane typeFZPAnd provide a stepped (Kino hologram)FZP
model |
Aspect ratio |
Membrane material |
Film thickness (μm) |
ΔRn (nm) |
D (μm) |
N |
Tm (nm) |
FZP-S38/84 |
4.2 |
SiN |
0.15 |
38 |
84 |
550 |
160 |
FZP-S50/80 |
5 |
SiN |
0.2 |
50 |
80 |
400 |
250 |
FZP-S40/155 |
5 |
SiN |
2 |
40 |
155 |
970 |
200 |
FZP-S50/330 |
8 |
SiN |
1 |
50 |
330 |
1,650 |
400 |
FZP-S86/416 |
8 |
SiN |
2 |
86 |
416 |
1,200 |
700 |
FZP-100/155 |
8 |
SiN |
2 |
100 |
155 |
388 |
800 |
FZP-173/208 |
5.8 |
SiN |
2 |
173 |
208 |
300 |
1,000 |
FZP-200/206 |
8 |
SiN |
2 |
200 |
206 |
255 |
1,600 |
FZP-C234/2500 |
0.6 |
SiC |
0.2 |
234 |
2,500 |
2,670 |
150 |
NTT-AT's EUV-FZP has been optimized for EUV wavelengths.
Ta absorbent pattern on thin film achieves below 100nm/a
Minority 100 nanometer focusing and imaging, etc
-EUV microscope
-EUV Nanobeam Generation
-Ultra fine EUV inspection