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Hangzhou Yuzhiquan Precision Instrument Co., Ltd
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Hangzhou Yuzhiquan Precision Instrument Co., Ltd

  • E-mail

    wangxing@yzqjm.com

  • Phone

    15316162949

  • Address

    No. 666 Zhenhua Road, Xihu District, Hangzhou City, Zhejiang Province

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Two-photon polymerization

NegotiableUpdate on 02/10
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Overview
Two Photon Aggregation 3D Processing, Two Photon Aggregation-MPD: True 3D Maskless Lithography, capable of manufacturing high degree of freedom nanoscale 3D structures with a minimum feature size of up to 50nm. It provides excellent high-precision, 3D manufacturing solutions for research and development in multiple fields, including but not limited to micro nano optical devices, micro/nanofluidic chips, on-chip optical interconnects, and micromechanics.
Product Details

Two-photon polymerization_MPDTrue 3D maskless lithography can achieve high degree of freedom nanoscale 3D structure manufacturing, with a minimum feature size of up to 50nm. It provides excellent high-precision, 3D manufacturing solutions for research and development in multiple fields, including but not limited to micro nano optical devices, micro/nanofluidic chips, on-chip optical interconnects, and micro mechanics.

Two-photon polymerization_MPDparameter

system parameters

MPD-100 sub series

MPD-1000 sub series

MPD-2000 sub series

Minimum horizontal feature size (nm)

XY≤80

XY≤80

XY≤50

Horizontal minimum period/resolution (nm)

XY≤300

XY≤300

XY≤200

Splicing accuracy (nm)

≤ 200

Maximum surface roughness (nm)

≤5

Note: The above values are only typical ranges for each parameter and are not limit values. Example: The minimum feature size xy ≤ 80nm, and the actual minimum achievable feature size is below 80nm.

Featured features and configurations (x - not included in standard machine, √ - standard machine configuration, ○ - optional)

MPD-100 sub series

MPD-1000 sub series

MPD-2000 sub series

High precision focusing

Accuracy ≤ 25nm, compatible with transparent/opaque substrates such as silicon, glass, sapphire, etc

Focal spot/aberration control

×

3D Confocal Focus

×

Three dimensional alignment

×

Multi parameter preview

Script function

intelligent strategy

1. Contour/Shell - Fill;
2. Arbitrary/Custom Sequence Mode
3. Dynamic focal spot control (grayscale)
4. Adaptive layer cutting
5. Vector processing mode

Fixture/substrate

1. Including but not limited to metals, glass (quartz), sapphire, silicon wafers, etc
2. Compatible with multiple substrate fixation modes: adsorption table, clamping, magnetic attraction
3. Supporting/customized fiber optic fixtures

Focal plane monitoring

Energy monitoring

Accessibility

Anchor point, measurement, marking, tilt compensation, rotation, etc

Photoresist/material

1. Self developed two-photon photoresist, HBP, PPI Dip, HBO-2, etc
2. Compatible with third-party two-photon photoresist; Other UV curable materials include but are not limited to AZ series and SU8 series
3. Support the printing of biocompatible hydrogel materials
4. Support glass, PDMS, and various precursor photoresists

Extension Function 1: Automatic Glue Injection

Extension Function 2: Fluorescence Confocal

×

Extension Function 3: Multi channel Expansion

Hardware configuration information (x - standard machine not included, √ - standard machine configuration, ○ - optional)

MPD-100 sub series

MPD-1000 sub series

MPD-2000 sub series

Focusing on the system

Standard configuration: Comprehensive magnification of 66 times, NA 1.42。 (Other magnifications and requirements can be customized)

Femtosecond Lasers

Center wavelength: 515nm/780nm (optional)
Average power: ≥ 1W
Pulse width: ≤ 200fs
Repetition frequency: 80MHz

translation stage

XYZ行程: 100mm×100mm×25mm

High precision Z-axis

Journey: 75 μ m; Accuracy: ≤ 10nm

Temperature Control System

Environmental temperature control system with an accuracy of ± 0.1 ℃ (the temperature reference value is the same as that of the external laboratory, and the external laboratory needs to ensure temperature stability better than ± 1 ℃)

Vibration isolation system

Configure multi-level active/passive isolation system

Installation conditions (the following are recommended conditions, more detailed parameters can be discussed with the manufacturer)

MPD-100 sub series

MPD-1000 sub series

MPD-2000 sub series

Electrical conditions

power supply conditions

Power supply line 6 square meters, 220V, 50Hz, 16A

Peak power/operating power

4kW/1kW

8kW/4kW

environmental conditions

Yellow light, cleanroom of 10000 level or above, vibration isolation level priority over VC-C, laboratory room temperature, recommended 21-23 ℃

compressed air

Not mandatory, only for active vibration isolation and adsorption table fixtures

Recommended usage area

2m×2m

Overall dimensions

Equipment body (mm, width x depth x height)

785×940×720

1300 × 1300 × 2200 (excluding constant temperature module 1900)

Cabinet (mm, width x depth x height)

620×800×1600

620×800×1600

Total weight (kg)

<600

<1200