-
E-mail
wangxing@yzqjm.com
-
Phone
15316162949
-
Address
No. 666 Zhenhua Road, Xihu District, Hangzhou City, Zhejiang Province
Hangzhou Yuzhiquan Precision Instrument Co., Ltd
wangxing@yzqjm.com
15316162949
No. 666 Zhenhua Road, Xihu District, Hangzhou City, Zhejiang Province
Two-photon polymerization_MPDTrue 3D maskless lithography can achieve high degree of freedom nanoscale 3D structure manufacturing, with a minimum feature size of up to 50nm. It provides excellent high-precision, 3D manufacturing solutions for research and development in multiple fields, including but not limited to micro nano optical devices, micro/nanofluidic chips, on-chip optical interconnects, and micro mechanics.
Two-photon polymerization_MPDparameter
| system parameters | MPD-100 sub series | MPD-1000 sub series | MPD-2000 sub series | |
| Minimum horizontal feature size (nm) | XY≤80 | XY≤80 | XY≤50 | |
| Horizontal minimum period/resolution (nm) | XY≤300 | XY≤300 | XY≤200 | |
| Splicing accuracy (nm) | ≤ 200 | |||
| Maximum surface roughness (nm) | ≤5 | |||
| Note: The above values are only typical ranges for each parameter and are not limit values. Example: The minimum feature size xy ≤ 80nm, and the actual minimum achievable feature size is below 80nm. | ||||
| Featured features and configurations (x - not included in standard machine, √ - standard machine configuration, ○ - optional) | MPD-100 sub series | MPD-1000 sub series | MPD-2000 sub series | |
| High precision focusing | Accuracy ≤ 25nm, compatible with transparent/opaque substrates such as silicon, glass, sapphire, etc | √ | √ | √ |
| Focal spot/aberration control | × | ○ | √ | |
| 3D Confocal Focus | × | ○ | ○ | |
| Three dimensional alignment | × | ○ | ○ | |
| Multi parameter preview | √ | √ | √ | |
| Script function | √ | √ | √ | |
| intelligent strategy | 1. Contour/Shell - Fill; | √ | √ | √ |
| Fixture/substrate | 1. Including but not limited to metals, glass (quartz), sapphire, silicon wafers, etc | √ | √ | √ |
| Focal plane monitoring | √ | √ | √ | |
| Energy monitoring | √ | √ | √ | |
| Accessibility | Anchor point, measurement, marking, tilt compensation, rotation, etc | √ | √ | √ |
| Photoresist/material | 1. Self developed two-photon photoresist, HBP, PPI Dip, HBO-2, etc | √ | √ | √ |
| Extension Function 1: Automatic Glue Injection | ○ | ○ | ○ | |
| Extension Function 2: Fluorescence Confocal | × | ○ | ○ | |
| Extension Function 3: Multi channel Expansion | ○ | √ | √ | |
| Hardware configuration information (x - standard machine not included, √ - standard machine configuration, ○ - optional) | MPD-100 sub series | MPD-1000 sub series | MPD-2000 sub series | |
| Focusing on the system | Standard configuration: Comprehensive magnification of 66 times, NA 1.42。 (Other magnifications and requirements can be customized) | |||
| Femtosecond Lasers | Center wavelength: 515nm/780nm (optional) | |||
| translation stage | XYZ行程: 100mm×100mm×25mm | |||
| High precision Z-axis | Journey: 75 μ m; Accuracy: ≤ 10nm | |||
| Temperature Control System | ○ | Environmental temperature control system with an accuracy of ± 0.1 ℃ (the temperature reference value is the same as that of the external laboratory, and the external laboratory needs to ensure temperature stability better than ± 1 ℃) | ||
| Vibration isolation system | ○ | Configure multi-level active/passive isolation system | ||
| Installation conditions (the following are recommended conditions, more detailed parameters can be discussed with the manufacturer) | MPD-100 sub series | MPD-1000 sub series | MPD-2000 sub series | |
| Electrical conditions | power supply conditions | Power supply line 6 square meters, 220V, 50Hz, 16A | ||
| Peak power/operating power | 4kW/1kW | 8kW/4kW | ||
| environmental conditions | Yellow light, cleanroom of 10000 level or above, vibration isolation level priority over VC-C, laboratory room temperature, recommended 21-23 ℃ | |||
| compressed air | Not mandatory, only for active vibration isolation and adsorption table fixtures | |||
| Recommended usage area | 2m×2m | |||
| Overall dimensions | Equipment body (mm, width x depth x height) | 785×940×720 | 1300 × 1300 × 2200 (excluding constant temperature module 1900) | |
| Cabinet (mm, width x depth x height) | 620×800×1600 | 620×800×1600 | ||
| Total weight (kg) | <600 | <1200 | ||