The high tilt angle thermoelectric in-situ system of transmission electron microscopy applies heat and electric field control to the sample through MEMS chips, and constructs a thermoelectric composite multi field automatic control and feedback measurement system in the high tilt angle sample stage. Combined with the use of various modes such as EDS, EELS, SAED, HRTEM, STEM, etc., it realizes real-time and dynamic monitoring of key information such as microstructure, phase transition, element valence state, micro stress, atomic level structure and composition evolution of the sample under vacuum environment with temperature and electric field changes at the nanometer or even atomic level.

Our Advantages
More key information
Tilt angle ≥ ± 75 °By using a series of different tilt angles, more two-dimensional imaging information can be obtained.
Excellent electrical performance
1. The chip electrodes designed with simulation verification have uniform electric field distribution and stable potential. The protective coating on the chip surface ensures low noise and accuracy in electrical measurement, and the current measurement accuracy can reach picoampere level.
2. Special design for MEMS microfabrication allows for simultaneous electrical testing and characterization during the heating process, without affecting temperature stability.
Excellent thermal performance
1. High precision infrared temperature measurement calibration,Micron level high resolutionThermal field measurement and calibration to ensure temperature accuracy.
2. The ultra-high frequency temperature control method with four electrodes eliminates the influence of wires and contact resistance, resulting in more accurate measurement of temperature and electrical parameters.
3. High stability precious metal heating wire (non ceramic material) is used, which is both a thermal conductive material and a thermal sensitive material. Its resistance has a good linear relationship with temperature. The heating zone covers the entire observation area, and the heating and cooling rates are fast. The thermal field is stable and uniform, and the temperature fluctuation in a stable state is ≤± 0.01 ℃.
4. Adopting a closed-loop high-frequency dynamic control and feedback environmental temperature control method, high-frequency feedback control eliminates errors, and the temperature control accuracy is ± 0.01 ℃.
5. Multi level composite heating MEMS chip design, controlling thermal diffusion during heating process, greatly suppressing thermal drift during heating process, ensuring efficient observation of experiments.
6. The heating wire is coated with silicon nitride on the outside, which does not react with the sample, ensuring the accuracy of the experiment.
Intelligent software and automation equipment
1. Human machine separation, software remote control of experimental conditions, program automation control of tilt angle.
2. Customize the program's heating curve. It is possible to define a heating program with more than 10 steps and a constant temperature time. At the same time, the target temperature and time can be manually controlled. If temperature and constant temperature are required during the heating process, the experimental plan can be adjusted immediately to improve experimental efficiency.
3. Built in absolute temperature calibration program, each temperature control of each chip can be re fitted and calibrated according to the change in resistance value, ensuring the accuracy of temperature measurement and the reproducibility and reliability of high-temperature experiments.
4. The entire process is equipped with precision automation equipment to assist manual operation and improve experimental efficiency.
Technical Specifications
| category |
project |
parameter |
| Basic Parameters |
Rod material
|
High strength titanium alloy |
| Number of electrodes |
4 |
| Window film thickness |
No film or 20nm |
| Drift rate |
< 0.5 nm/min (steady state) |
| Tilt angle |
α ≥ ± 75 ° (actual range depends on the pole shoe model) |
| Applicable electron microscope |
Thermo Fisher/FEI, JEOL, Hitachi |
| Suitable for extreme boots |
ST, XT, T, BioT, HRP, HTP, CRP |
| (HR)TEM/STEM |
support |
| (HR)EDS/EELS/SAED |
Heating process and high temperature detection support |
Application Cases

The voltage variation of Ag2Te based thermoelectric materials

0.4V voltage Ag2Te based thermoelectric material with high resolution
Ag2Te based thermoelectric materials can achieve mutual conversion between electrical and thermal energy through the movement of internal charge carriers; Therefore, during the experiment of applying voltage, there will be a phenomenon where the temperature of the sample increases with the increase of voltage; Research has shown that as the voltage continues to increase, the surface structure of the sample changes significantly, with irregular block like patterns evolving into strips or disappearing. Moreover, through the process of reducing the voltage, we found that the surface structure of the material undergoes reversible changes when the voltage is increased or decreased, indicating that the material has excellent thermoelectric and reusable properties.