Three temperature zone tube furnace

Three temperature zone tube furnace

Product application:

This device is mainly used in the semiconductor industry. The heating area of the equipment adopts independent control of three temperature zones, with a working temperature range of 500-800C, and the heating element is resistance wire heating. The size of the furnace tube is 4220 * 1300, and an N-type thermocouple is used for temperature measurement.

Product Features:

The furnace frame provides support for the entire furnace body, furnace tubes, and other parts. The overall structure is welded with square tubes to ensure sufficient strength and long-term deformation. The overall height is about 1.4m and the length is 1. There are seismic requirements during the installation of the entire furnace body, and the vibration during the annealing process is strictly controlled;

Heating unit: The heating element adopts resistance wire heating;

The insulation layer is made of high-quality high-purity alumina polycrystalline fiber material, which is cured and formed using vacuum adsorption molding technology imported from Japan;

The entire furnace body is composed of multiple heating units spliced together, divided into three temperature control zones;

The ceramic protective tube with a groove on the head of the temperature control thermocouple wire can protect the thermocouple head There are a total of 3 heating units and 3 temperature controlled thermocouples;

The temperature control adopts the Euro 2604 temperature control module;

Place furnace body, furnace shell, quartz tube and other equipment on the furnace rack. 55m， 0.75m wide, with a simple and beautiful appearance;

The furnace shell is a rectangular structure, and the main structure is welded with square tubes to ensure sufficient strength of the entire furnace body. There are sealing plates around the furnace shell, which have a simple and beautiful appearance;

There are seismic requirements during the installation of the entire furnace body, and the vibration during the annealing process is strictly controlled.

Core Structure and Characteristics:

Heating and insulation: Three sided heating with resistance wire, alumina polycrystalline fiber furnace, excellent insulation performance, fast heating and low energy consumption, with a weight only comparable to traditional furnaces 1/5 左右。

Temperature control and intelligence: 30 segment program temperature control, PID self-tuning, temperature control accuracy ± 1 ℃; Support remote control, data recording, and report output, suitable for unmanned operation.

Safety and durability: over temperature alarm and power-off, leakage protection, furnace door and heating interlock, disconnection alarm; The spring door buckle compensates for high-temperature shrinkage gaps and ensures reliable sealing.

Selection and usage points:

Selection: Select the volume according to the sample size, the heating rate according to the process, the gas port configuration according to the atmosphere requirements, and the temperature control module according to the accuracy.

Usage: Shao needs to be dried in an oven to remove moisture; The heating rate should not be at full load for a long time to avoid damaging the furnace and components; Regularly check the status of resistance wires, thermocouples, and insulation layers.

Selection Table for Three Temperature Zone Tube Furnace Equipment: