TS2000 automatic probe station

MPI TS2000 is a natural evolution of mature probe systems worldwide, designed specifically to meet the requirements of advanced semiconductor testing markets. This system is fully compatible with all MPI system accessories and is primarily used to address special requirements for fault analysis, design validation, IC engineering, wafer level reliability, and testing of MEMS, high-power, RF, and mmW devices.

product description

The TS2000 can be used in ambient temperature and/or hot only temperature operating modes, with speeds up to 10 Dies/second (depending on the final configuration), making it an ideal choice for pre production electrical testing on discrete RF devices, such as:

1. Suitable for various mass-produced wafer measurement applications

• Module measurement - DC-IV/DC-CV/Pulsed-IV
• RF measurement - up to 67 GHz
• High power production testing - up to 10 kV/600 A
• Integrated Circuit Design Verification - Room Temperature to 300 ° C

2. Mass production reliability

Specially designed for 24/7 stable and reliable mass production testing

Built in passive seismic table

Optional suspension base

Suitable for measuring from room temperature to 300 ° C

3. Ergonomic design and flexible selection

Simple and convenient design of single crystal circular upper plate for front door

Large area workbench design, capable of carrying up to 12x DC or 4x DC+4x RF micro locators, or 4.5 "standard probe card fixtures

There are also various wafer stages, 4.5 "probe card fixtures to choose from, and many accessories such as DC/RF micro locators, optical microscopes, etc. to fully support your application needs

Characteristics and advantages

1. Widely using large probe pressure plates

The TS2000 series offers large, easily accessible probe pressure plates that can accommodate up to 12x DC or 4x RF MicroPositioners

The integration of load pull tuner or larger area MicroPositioners makes the TS2000 system an ideal choice for RF and mmW measurements

2. Easy wafer loading

The large front door passage can easily load/unload 100, 150, 200mm wafers, wafer fragments, or even ICs smaller than 5 * 5mm

The AUX chuck is located at the front for easy loading/unloading. There is no simple automated method allowed for RF calibration and probe card cleaning during the launch phase

3. Integrated hardware control panel

The intelligent hardware control panel is fully integrated into the probe system, based on decades of experience and customer interaction design, providing faster, safer, and more convenient system control and testing operations

If necessary, the position of the keyboard and mouse can be controlled by the software, and Windows based instruments can also be controlled.

The vacuum control panel for wafers and AUX chucks is located on the front right side for easy operation during loading/unloading processes.

4. Hot card disk integration

The hot card tray (from 20 ℃ or ambient temperature to a maximum of 300 ℃) can be operated using a fully integrated touchscreen display, placed in a convenient location in front of the operator for quick operation and immediate feedback.

5. P probe card and micro locator - performed simultaneously

Many single probes, thin probe card holders for 4.5 "× 11" probe cards, and lower board to chuck distances are ideal choices for using active probes for simultaneous detection, making this system an ideal choice for design validation and fault analysis work.

6. Integrated DarkBox

TS2000D is the TS2000 integrated with Dark Box!

This system is designed specifically for the best footprint, embedded interlocking, LED lighting, and standardized interface panels for various measuring instruments, making it the preferred choice for light and laser safety protection testing environments.

Easy access from the back panel, allowing for quick and convenient reconfiguration or initial setup

7. Instrument integration

The optional instrument rack reduces cable length and improves measurement dynamics and directionality for F and mmW applications

8. Vibration isolation

T52000 adopts two types of vibration isolation solutions, which can operate better in non networked laboratory testing environments. The total floor area is equivalent to or smaller than the existing independent vibration isolation meters commonly used in industry

9. Software Suite SENTIO

The MPI automated engineering probe system is controlled by a unique and revolutionary multi touch operation SENTIO software suite - simple and intuitive operation saves a lot of training time. The Scroll, Zoom, Move commands mimic modern intelligent mobile devices, allowing everyone to become an expert in just a few minutes.

For RF applications, there is no need to switch to another software platform - the MPI RF calibration software program QAlibria is fully integrated with SENTIO - easy to use by following a single operating concept approach