TMC active air damper

NegotiableUpdate on 01/09

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

TMC active air damper, Electro-Damp It is the first commercial active isolation system specifically designed to improve throughput, resolution, and yield in semiconductor manufacturing applications. Electro Pump II is a complete redesign of the original system, adding modularity, digital control, feedforward, high force/high gap actuators, and multiple digital user interfaces specifically designed for OEM applications such as lithography, detection, and metrology tools.

Product Details

TMCActive air vibration dampingdeviceElectro-Damp II

Electro-Damp ® It is the first commercial active isolation system specifically designed to improve throughput, resolution, and yield in semiconductor manufacturing applications. Electro Pump II is a complete redesign of the original system, adding modularity, digital control, feedforward, high force/high gap actuators, and multiple digital user interfaces specifically designed for OEM applications such as lithography, detection, and metrology tools.

Semiconductor manufacturing tools have put forward contradictory requirements for their isolation systems. In order to cope with ground noise, the system must be soft enough to effectively filter ground vibrations and prevent them from reaching the isolation surface. At the same time, the system must be sufficiently rigid to cope with the forces of the workbench, so that the movement of the workbench can cause minimal displacement of the isolation surface and quickly stabilize.

TMC主动空气消振器

In addition to using inertia and active feedback damping,Electro Pump II also uses information feedforward to further improve system response. Feedforward obtains information about the position and acceleration of the worktable from the worktable controller, and then processes this data to provide force drive to the payload, greatly reducing the payload motion caused by the worktable. The system can read feedforward information digitally as a bipolar analog signal, or by reading the output of an orthogonal encoder. The DC-2000 digital controller can also use the workbench test mode to automatically adjust the parameters required for feedforward. This enables quick and easy setup during initial installation or after changing the payload.

The modular design of Electro Pump II allows the system to be used alone with electronic servo valves (suitable for heavy-duty, low acceleration applications such as CMM), only with electromagnetic drives (suitable for lighter workbenches using high acceleration), or in combination with both (suitable for demanding applications).

TMCActive air vibration dampingdeviceElectro-Damp IIfeature

● Six degree of freedom active damping system

● Non contact electronic height control

● Digital controller

● Feedforward input correction for payload motion caused by the workbench

High power electromagnetic actuators can be provided separately or integrated into the system

● Reduce the stability time of payload movement and movement caused by the workbench

● Improve throughput, resolution, and output

Modular design allows users to define a complete unit or component forOEM Integration

Automatically adjust feedforward parameters to reduce settings

Specifications

General
stabilization time	0.2 seconds**
Active degrees of freedom	6
Height control accuracy	< 10 µm atsensorsd>
Linear actuator (horizontal and vertical)
DC resistance	5 Ω
Force constant	Up to 12 pounds per ampere \| 55 newtons per ampere
Maximum continuous force	25 pounds \| 110 cows
Peak force @ 7 A	87 pounds \| 385 cows
Electrical time constant	2.6 milliseconds
itinerary	0.25 inches \| 6.4 millimeters
Horizontal gap	0.09 inches \| 2.3 millimeters
stray field	< 1 G @ 2in.d>
Dimensions (width x depth x height)	2.8 x 6.8 x 4.5 inches 71 x 173 x 114 mm
Valve (active only)
Valve Type	Proportional E/V servo
control type	Pressure or airflow
maximum flow	1.5 SCFM
Gas consumption (4 isolators)	< 2 SCFM (no stage motion)d>
-3 dB response	≤ 10 Hz (typical value).
Height control sensor
input	Non contact induction (eddy current)
electronic configuration	Dual line NAMUR Three wires with a diameter of 30 or 18 millimeters
scope	Nominal 15mm, used for 30mm wires Nominal 6mm, used for 18mm wires
resolution	< 1 µmd>
Pneumatic installation seat
Standard load-bearing capacity	1000, 2500, 3300, 5700 pounds @ 80 PSI
Damping (10:1)	< 3sd>
DC-2020 Digital Controller
processor	Dual core: DSP @ 150 MHz & Cortex M3 @ 75 MHz
Simulate I/O	32/24 channels (16/16 bits)
sampling rate	The nominal value is 5 kHz
front panel	power switch 3-color status indicator light Ethernet RJ-45 MicroSD card slot 2 BNC sockets (each can serve as an input or output) 2 USB 2.0 ports (Type B and Micro Type B) FW upgrade button
rear panel	power input Simulated I/O socket Pneumatic port Ethernet RJ-45 1 USB 2.0 RS-232 DB 9 Relay socket
user interface	GUI via USB or Ethernet
power supply	90-240 VAC，50-60 Hz， Maximum 100 W
Dimensions (width x depth x height)	16.8 x 9.0 x 1.75 inches 427 x 229 x 45 mm 1 standard RETMA unit
power amplifier
通道	8
Maximum current for each channel	7 A
input	linear
Peak Power	700 watts in total
cooling	Environment, forced ventilation
protect	Resettable fuse, electronic thermal protection, overcurrent, undervoltage
operation	Remote control or manual
size	1 RETMA rack unit height x 15 inches (381 millimeters) deep

Application Instructions

Electro-Damp®

InPrecitechUsing PEPS II-VX for 3-axis (XYZ) measurement on the Freeform L ultra precision machine tool

TMC主动空气消振器