TMC Active Air Isolation Leveling System

NegotiableUpdate on 01/09

Model

Nature of the Manufacturer: Producers

Product Category

Place of Origin

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Overview

The TMC active air isolation leveling system, PEPS II, is built upon TMC's advanced PEPS (Precision Electronic Positioning System) and has been improved upon. By adding a new digital controller, PEPS II is easier to use, provides more features, and has an improved user interface.

Product Details

TMC Active Air Isolation Leveling SystemPEPS II

PEPS II is built upon TMC's Precision Electronic Positioning System (PEPS) and has been improved upon. By adding a new digital controller, PEPS II is easier to use, provides more features, and has an improved user interface. PEPS II is a digital non-contact height control system used for TMC pneumatic isolation systems. This type of system typically includes a mechanical height valve and a mechanical height sensing linkage. Its applications include semiconductor manufacturing equipment that requires improved stability time and increased yield, as well as precision laboratory environments that require optimal noise performance and platform stability.

TMC主动空气隔振调平系统

TMC Active Air Isolation Leveling SystemPEPS IIfeature

● Digital control, user-friendlyLCD interface

● Used forNon contact electric pneumatic height control of Gimbal Piston, CSP, and MaxDamp isolation systems

●Z-axis position reproducibility: 10 microns

Due to the elimination of the lever contact point in traditional mechanical height control systems, the vibration isolation effect has been improved

The pneumatic feedforward function minimizes to the greatest extent possibleResponse of Z-axis to X-Y platform motion

Can be adjusted to quickly and stablyMotion caused by X-Y platform

● Optional“VX "function integrates inertial sensors for active damping of vertical isolator resonance

● Compatible with 'Softdock Station'. Allow loading without motion installation/Unloading wafers

Corresponding electronic valves. Switches or traditional electronic valves do not produce pulse noise

Exhaust pipes are used for cleaning and treating exhaust gases

● Logical docking control and status

Specifications

physical dimensions	PEPS II controller 1.72 inches (43.7mm) high x 8.0 inches (203mm) wide x 9.4 inches (240mm) deep
weight	PEPS II controller: approximately 3.0 pounds (1.2 kilograms)
environment (Refer to EN 61010-1:1993, EN 61010-1/A2: 1995）	Indoor use only, up to 2000 meters above sea level (6560 feet) Maximum allowable temperature range: 5 ° C to 35 ° C Maximum allowable humidity: 80% below 31 ° C, linearly decreases to 50% relative humidity at 40 ° C Main power supply voltage tolerance: 85 VAC -240 VAC Overvoltage category: 2 Pollution level (IEC 664): 2 Ventilation requirements: a gap of 25 millimeters on both sides and a gap of 0 millimeters above and below
Power requirements	Power input voltage range: 90-230 VAC Input frequency range: 50-60 Hz
PEPSII User Interface (Front panel)	power switch 4 menu buttons LCD displays 20 x 2 characters 2 diagnostic sockets (BNC type) Tri color status indicator light USB port
PEPSII Interface (Rear panel)	AC power input with EMI filter 1 air input card in port for 1/4 inch outer diameter pipes 1 air output (exhaust) snap in port for 1/4 inch outer diameter pipes 4 air snap in ports for 1/4 inch outer diameter pipes (one per isolator) DB-25 male input terminal - output terminal and feedforward socket 1 Phoenix 0.2 inch pitch 6-pin green connector (vertical proximity sensor) 1 Phoenix 3.5mm pitch 6-pin black connector (horizontal proximity sensor) Grounding thread stud (# 10-32 thread) DB-25F socket: 1 digital input terminal, 3 seismic detector sensor interfaces ("- DX" option) DB-25F socket: 1 digital input terminal, 3 current output proximity sensors (optional)
PEPS II Performance Specifications	Analog input (unipolar): 8 x 12 bits (16 bits using oversampling), 0 .. 3.0 V full range Analog input (feedforward): 5 x 12 bits (16 bit oversampling), ± 9 V full-scale Analog input (single pole) protection:+5V, -0.5V limiting Analog input (feedforward) protection: ± 15V limiting Analog output: 4 x 12 bits (16 bits using sampling), 0 .. 3.0 V full range Analog output (optional): 8 x 16 bits, 0 .. 3.0 V full range Analog output protection: infinite short circuit protection,+5V limiting Rated value of digital input voltage: 0 ..+3.3 V,+5 V tolerance (+5 V limit) Rated value of digital output: 0 .. + 3.3 V， Maximum 20 mA Digital I/O protection:+5V, -0.5V limiting External available power supply:+5 VDC, maximum 2.0 A;+15 VDC, maximum 1.0 A (maximum 20 watts) Communication port: USB, displayed as RS-232 on PC Processor: ARM7TDMI/41.78 MHz Control loop rate: 100 Hz -2.0 KHz Proximity sensors: 3 vertical, (3 horizontal optional) eddy currents, NAMUR 0-20 mA output Speed sensor seismic detector ("- VX" option): 3 vertical, current output
Pneumatic specifications	Long term high stability: ± 50 microns Long term tilt stability: ± 50 micro radians Servo valve: 4 x bidirectional variable orifice proportional servo valve Valve technology: Pure Class A Maximum input pressure: 120 PSI or 8.3 bar or 830 KPa Nominal gas consumption: 60 standard liters per minute (2 standard cubic feet per minute) Air requirements: Clean and dry air, filtered to 20 microns or above Fault safety: The isolator will release air in case of power failure or power outage Pneumatic connector: "One touch" quick connector, suitable for 1/4 inch outer diameter hose

performance

TMC主动空气隔振调平系统