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Swiss VAT vacuum valve 59024-GE01-0003
NegotiableUpdate on 05/18
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Overview
Swiss VAT vacuum valve 59024-GE01-0003 $r $n model analysis (VAT naming rules) $r $n code segment meaning $r $n59024 series: high vacuum angle valve $r $nGE01 flange type: ISO-KF40 $r $n0003 configuration code: with pneumatic actuator
Product Details
Swiss VAT vacuum valve 59024-GE01-0003
1. Model analysis (VAT naming convention)
| code snippet | meaning |
|---|---|
| 59024 | Series: High Vacuum Angle Valve |
| GE01 | Flange type: ISO-KF40 |
| 0003 | Configuration code: with pneumatic actuator |
2. Core parameters
| parameter | specification |
|---|---|
| vacuum range | 10⁻⁶ ~ 1000 mbar |
| leakage rate | ≤ 1 × 10 ⁻⁹ mbar · L/s (helium test) |
| Flange Standard | ISO-KF40（DN40） |
| Valve body material | Stainless steel 316L (EP polished) |
| sealing material | Fluororubber (FKM)/optional all metal seal |
| Drive Type | Pneumatic (working pressure 4-6 bar) |
| response time | ≤ 0.5 seconds (on/off) |
| temperature range | -20 ℃~150 ℃ (standard type) |
3. Structural characteristics
Ultra high vacuum design：
Metal bellows seal (zero leakage)
The valve plate adopts conical sealing (10 ⁻⁹ mbar level sealing)
pneumatic actuator：
Double acting cylinder (requires solenoid valve control)
Equipped with mechanical position indicator
4. Typical applications
semiconductor equipment：
Isolation of wafer transfer chamber
CVD/PVD process chamber
Research equipment：
Synchrotron radiation beamline
Particle accelerator vacuum system
5. Installation requirements
Flange installation：
Torque limit: 10 Nm (ISO-KF40 clamp)
Oxygen free copper sealing ring (P/N: VAT-CU40) is required
Gas path connection：
Drive air port: G1/8 '(recommended to use argon gas for blowing)
6. Electrical interface (requires solenoid valve)
| signal | requirement |
|---|---|
| Valve opening signal | 24V DC (driving solenoid valve) |
| Valve closing signal | Spring reset (automatic valve closure upon power failure) |
7. Maintenance points
| project | cycle | operation |
|---|---|---|
| Sealing ring replacement | 2 years or 10 cycles | Special fixtures are required for disassembly |
| Bellows inspection | 1 year | Helium mass spectrometer detection |
| Drive cylinder lubrication | 6 months | Use PFE vacuum grease |
8. Comparison of alternative models
| Brand | differentiating points |
|---|---|
| VAT 59024-GE01-0004 | Electric actuator version |
| Pfeiffer VAT 58500 | Direct valve, larger flow rate |
| NorCal UHV-40 | 20% lower price, slightly higher leakage rate |
The standard delivery time for this model is 8-12 weeks. If neededUltra high temperature version (300 ℃)OrNon-magnetic versionAn additional 6-week customization cycle is required. Suggest using VAT in conjunction with it52X seriesThe solenoid valve group realizes automatic control.
Swiss VAT vacuum valve 59024-GE01-0003
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