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Shanghai Maoshuo Machinery Equipment Co., Ltd
Swiss VAT 54 series pneumatic high vacuum baffle valve
NegotiableUpdate on 05/18
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Overview
Swiss VAT 54 series pneumatic high vacuum barrier valve $r $n Product type: Pneumatic Gate Valve $r $n $r $n Core function: $r $n $r $n Fast isolation of vacuum chamber (on/off time Lt; 1 second) $r $n $r $n Ultra High Vacuum (UHV) systems suitable for semiconductors, photovoltaics, and research equipment
Product Details
Swiss VAT 54 series pneumatic high vacuum baffle valve
1、 54 series product positioning
Product TypePneumatic Gate Valve
core functionality：
Quick isolation vacuum chamber (on/off time<1 second)
Suitable for semiconductor, photovoltaic, and scientific research equipmentUltra high vacuum (UHV) system
core advantage：
Low leakage rate to<1×10 ⁻⁹ mbar·L/s(Metal sealed version can reach 10 ⁻¹¹ mbar · L/s)
Zero leakage design, compatiblecorrosive gas(such as Cl ₂, SF ₆ in CVD process)
2、 Model Naming Rules (Taking VAT 54152-AA as an Example)
| code snippet | meaning |
|---|---|
| 54 | Series Name (Pneumatic Baffle Valve) |
| 1 | Valve body size (1=DN40, 5=DN200) |
| 52 | Flange type (52=ISO-K, 62=CF) |
| AA | Sealing material (AA=fluororubber, MM=metal) |
3、 Comparison of commonly used sub models in the Chinese market
| model | path | Flange Type | Sealing material | temperature range | Typical application scenarios |
|---|---|---|---|---|---|
| VAT 54112-AA | DN40 | ISO-K | fluororubber | -20~+150°C | Small vacuum transmission chamber |
| VAT 54152-MM | DN63 | ISO-K | metal seal | -200~+250°C | Semiconductor etching machine |
| VAT 54562-AA | DN200 | CF | fluororubber | -20~+150°C | Photovoltaic coating equipment |
| VAT 54652-MM | DN160 | ISO-K | metal seal | -200~+250°C | ion implanter |
4、 Core technical parameters
真空性能：
Leakage rate: Fluororubber version<1 × 10 ⁻⁹ mbar · L/s, metal sealing version<1 × 10 ⁻¹¹ mbar · L/s
Pressure difference: Standard version 10 ⁻⁹ mbar to atmospheric pressure (bidirectional pressure resistance optional)
mechanical properties：
Drive mode: Double acting pneumatic (requires compressed air of 0.5~0.7MPa)
Opening and closing time: DN63 ≤ 0.5 seconds, DN200 ≤ 1.5 seconds
Cycle life:>500000 times (metal sealed version)
Material Compatibility：
Fluororubber (AA): Low cost, not resistant to plasma
Metal seal (MM): corrosion-resistant, high temperature resistant, priced 30%~50% higher
Valve body material: 316L stainless steel (optional electrolytic polishing EP grade)
Sealing options:
5、 Key steps for selection
Determine the diameterSelect DN40/DN63/DN160/DN200 based on pipeline flow rate
Choose sealing：
Conventional process: Fluororubber (AA)
Etching/ion implantation: Metal sealing (MM)
Match flange：
ISO-K flange: high flow (such as coating equipment)
CF flange: ultra-high vacuum (such as semiconductor cavity)
special requirements：
Corrosive gas: optionalNickel plated valve bodyorHastelloy seal
High temperature environment: metal seal+high temperature solenoid valve (such as Festo MS6 series)
6、 Key points for installation and maintenance
Installation specifications：
The valve body should be installed horizontally or vertically (to avoid tilting)
The flange bolts need to be tightened in diagonal order (torque reference VAT manual)
Maintenance Recommendations：
Check the wear of the sealing surface every 6 months (the metal sealing plate can be regularly ground)
The fluororubber sealing ring needs to be left to stand for 12 hours after exposure to the atmosphere before vacuuming
7、 Typical fault handling
| fault phenomenon | Possible reasons | solution |
|---|---|---|
| The valve cannot be closed | Sealing surface contamination/insufficient cylinder pressure | Clean the sealing surface and check that the gas path is ≥ 0.5MPa |
| Slow vacuum pumping speed | The valve plate is not open | Adjust cylinder stroke or replace solenoid valve |
| Leakage rate exceeds the standard | Aging of sealing ring/damage to flange | Replace the seal and perform helium mass spectrometry leak detection |
8、 Alternative solutions for the Chinese market
domestic substitution：
Shenyang KeyiGDC series baffle valve(DN40~DN250, leakage rate<5 × 10 ⁻⁹ mbar · L/s)
Japanese brand：
SMCVZH series(Low to medium vacuum, high cost-effectiveness)
delivery cycle：
Standard model: 4-6 weeks
Customized version (such as nickel plated valve body): 8-12 weeks
Swiss VAT 54 series pneumatic high vacuum baffle valve
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