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Swiss VAT vacuum gate valve plate 96603-01
NegotiableUpdate on 05/18
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Overview
Swiss VAT vacuum gate valve plate 96603-01 $r $n Basic information $r $n Original part number: 96603-01 $r $n $r $n Applicable valve model: VAT 96600 series high vacuum gate valve $r $n $r $n Material: stainless steel 316L (electrolytic polishing EP grade) $r $n $r $n Surface treatment: Ra ≤ 0.1 μ m (mirror polishing)
Product Details
Swiss VAT vacuum gate valve plate 96603-01
1. Basic information
Original part number：96603-01
Applicable valve modelsVAT 96600 series high vacuum gate valve
materialStainless steel 316L (electrolytic polished EP grade)
surface treatmentRa ≤ 0.1 μ m (mirror polished)
2. Core parameters
| parameter | specification |
|---|---|
| size | Compatible with DN160 (6.3 ') valve |
| thickness tolerance | ±0.005mm |
| flatness | ≤0.01mm/m |
| Vacuum sealing grade | ≤ 1 × 10 ⁻⁹ mbar · L/s (with metal sealing ring) |
| Temperature resistance range | -270 ℃~+450 ℃ (fully metal sealed configuration) |
3. Structural characteristics
Double sided sealing design：
Main sealing surface: cone-shaped metal seal (copper or stainless steel)
Secondary seal: Optional elastomer seal (such as VITON) ®）
guidance system：
Precision linear guide (friction coefficient<0.001)
Driver interface：
Standard adaptation VAT pneumatic actuator (such as 96100 series)
4. Compatible with valve models
| VAT Valve Series | Specific model examples |
|---|---|
| 96600 | 96603, 96606, 96610 |
| 96800 | 96803 (size to be confirmed) |
5. Installation and maintenance
Installation steps：
Clean the valve chamber (using a dust-free cloth and high-purity alcohol)
Pre installed sealing ring (requires specialized installation fixture)
Manually test the sliding resistance after inserting the valve plate (should be ≤ 5N)
Torque requirements：
Flange bolt torque: 20-25 Nm (ISO-KF160)
6. Service life indicators
| working condition | life expectancy |
|---|---|
| High vacuum at room temperature (<10 ⁻⁷ mbar) | >10 cycles |
| High temperature (300 ℃) | About 5 × 10 cycles |
| Plasma environment | Wear needs to be checked every 5 × 10 ⁵ times |
7. Wear detection method
optical inspection：
Measure scratches on the sealing surface using a white light interferometer (depth ≤ 0.5 μ m is safe)
performance test：
Helium mass spectrometry leak detection (≤ 1 × 10 ⁻⁹ mbar · L/s in valve plate closed state)
8. Comparison of alternative solutions
| Brand | differentiating points |
|---|---|
| VAT 96603-01-M | Gold plated sealing surface (corrosion-resistant+conductive) |
| Pfeiffer PGV 160 | Compatible but requires modification of the actuator interface |
| Domestic imitation parts | 60% lower cost, approximately 40% longer lifespan, original factory |
The valve plate needs to be coordinatedVAT 229310 series sealing ringuse Forsemiconductor equipmentIt is recommended to force replacement every 2 years or 10 cycles. Customized versions (such as aluminum nitride coating) require an additional 8 weeks of delivery time.
Swiss VAT vacuum gate valve plate 96603-01
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