Swiss VAT vacuum valve 01034-KE01-0002

NegotiableUpdate on 05/18

Model

Nature of the Manufacturer: Producers

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Place of Origin

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Overview

Swiss VAT vacuum valve 01034-KE01-0002 $r $n model analysis (VAT naming rules) $r $n code segment meaning $r $n01034 series: small-diameter high vacuum angle valve $r $nKE01 flange type: ISO-KF16 (DN16) $r $n0002 configuration code: with pneumatic actuator+position sensor

Product Details

Swiss VAT vacuum valve 01034-KE01-0002

1. Model analysis (VAT naming convention)

code snippet	meaning
01034	Series: Small caliber high vacuum angle valve
KE01	Flange type: ISO-KF16 (DN16)
0002	Configuration code: Equipped with pneumatic actuator and position sensor

2. Core parameters

parameter	specification
vacuum range	10⁻⁹ ~ 1000 mbar
leakage rate	≤ 1 × 10 ⁻⁹ mbar · L/s (metal seal)
Valve body material	Stainless steel 316L (EP polished)
Sealing options	All metal seal/FFKM elastomer
Drive Type	Pneumatic double acting (4-6 bar)
response time	≤ 0.3 seconds (on/off)
temperature range	-200 ℃~250 ℃ (standard type)

3. Structural characteristics

Zero leakage design：

Metal bellows transmission (no risk of dynamic seal leakage)
Conical valve seat seal (10 ⁻⁹ mbar level seal)

intelligent feedback：

Integrated magnetic coupling position sensor (PNP output)
LED status indicator light (red/green dual color)

4. Typical applications

Analytical Instrument：

Isolation of mass spectrometer injection system
Electron Microscope Sample Room

semiconductor：

Wafer Transfer Module (EFEM)
Gas pathway control of etching equipment

5. Installation specifications

flange connection：

Torque limit: 5 Nm (ISO-KF16 clamp)
Sealing ring: Oxygen free copper gasket (P/N: VAT-CU16)

Gas path requirements：

Driving gas: nitrogen or argon (purity ≥ 99.999%)
Pipeline filtration: 0.1 μ m filter

6. Electrical interface

terminal	function
1 (brown)	24V DC+
2 (Blue)	0V
3 (Black)	Valve Open Signal (PNP)
4 (white)	Valve Closing Signal (PNP)

7. Maintenance cycle

project	operation	cycle
Sealing surface inspection	White light interferometer detection	1 year/10 cycles
Lifespan of corrugated pipe	Helium leak detection test	5 years or 10 cycles
Position sensor calibration	Valve position feedback adjustment	2 years

8. Fault diagnosis

code	meaning	solution
E01	Sensor signal loss	Check magnetic coupling alignment
E03	Insufficient air pressure	Confirm that the driving pressure is ≥ 4 bar
E05	Over-temperature alarm	Check if the ambient temperature exceeds the standard

9. Alternative solutions

Brand	differentiating points
VAT 01034-KE01-0001	No position sensor
Pfeiffer EVR 116	Electric actuator, slow response
NorCal UHV-16	25% lower price, slightly higher leakage rate

The standard delivery time for this model is 12 weeks. If neededUltra high vacuum version (10 ⁻¹¹ mbar)OrNon-magnetic versionAn additional 6-week customization cycle is required. Suggest using VAT in conjunction with it52X seriesThe solenoid valve group realizes automatic control.

Swiss VAT vacuum valve 01034-KE01-0002