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Swiss VAT vacuum component 334347
NegotiableUpdate on 05/18
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Overview
Swiss VAT vacuum component 334347 $r $n Product identity confirmation $r $n Original part number: 334347 $r $n $r $n Series: VAT vacuum valve sealing component $r $n $r $n Applicable models: $r $n $r $nVAT 59000 series high vacuum angle valve $r $n $r $nVAT 47000 series gate valve
Product Details
Swiss VAT vacuum component 334347
1. Product identity confirmation
Original part number：334347
Belonging seriesVAT vacuum valve sealing component
Compatible Models：
VAT 59000 series high vacuum angle valve
VAT 47000 series gate valve
2. Core parameters
| parameter | specification |
|---|---|
| material | Perfluoroether rubber (FFKM) |
| hardness | 75±5 Shore A |
| Vacuum sealing grade | ≤1×10 ⁻⁹ mbar·L/s |
| Temperature resistance range | -20 ℃~+320 ℃ (short-term 350 ℃) |
| chemical resistance | Resistant to plasma/ozone/acid-base corrosion |
| Dimensions | Compatible with DN63 (2.5 ') valve flange |
3. Structural features
Composite design：
Main sealing lip: Double channel FFKM sealing edge
Supporting skeleton: Stainless steel 316L inner embedded ring
Anti compression design：
Sectional optimization structure (pressure bearing capacity increased by 30%)
4. Compatible with valve models
| VAT Valve Series | specific model |
|---|---|
| 59000 | 59063, 59080 |
| 47000 | 47150, 47200 |
| 39000 | Need to confirm flange size matching |
5. Installation specifications
surface treatment：
Flange sealing surface roughness Ra ≤ 0.8 μ m
Clean with lint free cloth and isopropanol
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installation torque：
Flange Type Recommended torque ISO-KF63 15~18 Nm CF63 30~35 Nm
6. Performance verification standards
Helium mass spectrometry leak detection：
Test pressure: 1 × 10 ⁻⁶ mbar
Allowable leakage rate: ≤ 1 × 10 ⁻⁹ mbar · L/s
aging test：
Compression deformation ≤ 20% after baking at 250 ℃ for 72 hours
7. Comparison of alternative solutions
| Brand | differentiating points |
|---|---|
| VAT 334347-M | Metal coated version (resistant to 450 ℃) |
| Pfeiffer 033434 | Kalrez ® Material, price+40% |
| Domestic FFKM-DN63 | 60% lower cost, approximately 50% longer lifespan, original factory |
8. Maintenance and lifespan
| operating conditions | Expected replacement cycle |
|---|---|
| High vacuum at room temperature (<10 ⁻⁷ mbar) | 3-5 years |
| Plasma environment | 6-12 months |
| High temperature (280 ℃) | 1-2 years |
This seal requires coordinationVAT specific vacuum grease (P/N: 334500)use Forsemiconductor equipmentIt is recommended to replace it preventively every 12 months and keep the old parts for failure analysis. Batch orders (≥ 50 pieces) can apply for a 15% annual agreement discount.
Swiss VAT vacuum component 334347
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