Swiss VAT Vacuum Valve 47 Series

Swiss VAT Vacuum Valve 47 Series

The following is aboutSwiss VAT company 47 series high vacuum angle valveDetailed technical analysis, covering its model classification, technical characteristics, selection guidelines, and application situation in the Chinese market:

1、 VAT 47 series product positioning

• Product TypePneumatic driven high vacuum angle valve

• core purpose：

• Isolation and ventilation control of vacuum chamber

• Suitable for ultra-high vacuum (UHV) scenarios such as semiconductors, photovoltaics, vacuum coating, scientific research equipment, etc

• core certification：

• Compliant with SEMI standards, leakage rate<1 × 10 ⁻⁹ mbar · L/s

• Material compatibility: 316L stainless steel, FKM or all metal seal

2、 Model Naming Rules (Taking VAT 47152-AA as an Example)

3、 Comparison of commonly used sub models in the Chinese market

4、 Core technical parameters

1. 真空性能：

• Leakage rate: Fluororubber version<1 × 10 ⁻⁹ mbar · L/s, metal sealing version<1 × 10 ⁻¹¹ mbar · L/s

• Pressure difference: Standard version 1 × 10 ⁻⁹ mbar to atmospheric pressure (metal sealed version can reach 10 ⁻¹² mbar)

2. mechanical properties：

• Drive mode: single/double acting pneumatic (requires 0.4~0.6MPa compressed air)

• Opening and closing time:<1 second (for specifications below DN40)

• Cycle life:>1 million cycles (metal sealed version>500000 cycles)

3. environmental adaptability：

• Fluororubber version solvent resistance: compatible with acetone and alcohol (not compatible with strong acids)

• Metal sealed version baking temperature: up to 250 ° C (requires optional high-temperature solenoid valve)

5、 Key steps for selection

1. Determine the diameterSelect DN16/DN40/DN63/DN160 according to pipeline size

2. Choose sealing：

• Fluororubber (AA): Low cost, suitable for general vacuum (≤ 10 ⁻⁹ mbar)

• Metal seal (MM): ultra-high vacuum (≤ 10 ⁻¹¹ mbar), high temperature resistance

3. Match flange：

• CF flange: ultra-high vacuum standard (semiconductor industry)

• ISO-K flange: high flow applications (such as coating equipment)

4. drive configuration：

• Single acting (spring reset): automatically shuts off upon power failure

• Double acting: requires bidirectional pneumatic control for faster response

6、 Key points for installation and maintenance

• Installation specifications：

• The direction of the arrow on the valve body should be consistent with the direction of the airflow

• The flange bolts need to be gradually tightened diagonally (torque reference VAT technical manual)

• Maintenance Recommendations：

• Fluororubber sealing ring should be replaced every 2 years (under frequent use conditions)

• Metal sealed valves undergo helium mass spectrometry leak detection every 5 years

7、 Typical fault handling

8、 Alternative solutions for the Chinese market

1. domestic substitution：

• Beijing Zhongke Scientific InstrumentZK series angle valve(DN16~DN200, leakage rate<5 × 10 ⁻⁹ mbar · L/s)

2. Japanese brand：

• SMCVXH series(Suitable for medium and low vacuum, high cost-effectiveness)

• delivery cycleRegular model inventory takes 2-4 weeks, customized valve body takes 8-12 weeks

Swiss VAT Vacuum Valve 47 Series