Swiss VAT 590 series electric high fidelity air conditioning valve

Swiss VAT 590 series electric high fidelity air conditioning valve

1、 590 series product positioning

• Product TypeElectric driven proportional control valve for high fidelity air conditioning

• core functionality：

• Precision pressure regulation(10 ⁻³~10 ⁻⁹ mbar range)

• Dynamic flow control (applicable to CVD, PVD, etching and other processes)

• core advantage：

• Resolution up to0.1% full scaleResponse time<50ms

• All metal seal (leakage rate<1 × 10 ⁻¹¹ mbar · L/s)

• supportAnalog quantity (0-10V/4-20mA)AndDigital communication (RS485/Profibus)control

2、 Model Naming Rules (Taking VAT 590.12-AA as an Example)

3、 Comparison of commonly used sub models in the Chinese market

4、 Core technical parameters

1. performance tuning：

• linearity: ± 0.5% full scale

• repeatability accuracy：±0.2%

• Flow coefficient (Cv)：0.02（DN25）~0.15（DN63）

2. Electrical Characteristics：

• Power supply voltage: 24V DC ± 10%

• Power consumption:<15W (standby<5W)

• Position feedback: Optional 0-10V or SSI absolute encoder

3. environmental adaptability：

• Fluororubber seal: -20 ° C~+150 ° C

• Metal seal: -200 ° C~+250 ° C (baking condition)

• Temperature range:

• Corrosion resistance: compatible with process gases such as Cl ₂, NF ∝, etc. (nickel plated valve body optional)

5、 Key steps for selection

1. Determine the diameter：

• Select DN25/DN40/DN63 based on traffic demand

• Calculation formula:$𝑄={𝐶}_{𝑣}\cdot \sqrt{\mathrm{\Delta }𝑃\cdot 𝜌}$
  (Q: Flow rate, Δ P: pressure difference, ρ: gas density)

2. Select control mode：

• analog controlSuitable for direct control by PLC

• Digital CommunicationSuitable for integration into intelligent vacuum management systems

3. Sealing material：

• Fluororubber (AA)Low cost, suitable for general vacuum (≤ 10 ⁻⁹ mbar)

• Metal seal (MM)Ultra high vacuum (≤ 10 ⁻¹¹ mbar), plasma resistant

4. Special Options：

• Heating versionPrevent gas condensation (such as SiH ₄ process)

• ATEX explosion-proof certification: Used in hazardous environments

6、 Key points for installation and debugging

• Mechanical Installation：

• The direction of the valve body should be consistent with the airflow (indicated by the arrow)

• Avoid vibration sources (it is recommended to install shock absorbers)

• electrical connection：

• Shielded cable wiring (to prevent electromagnetic interference)

• Grounding resistance<1 Ω

• parameter calibration：

1. Set the zero position (0% opening) through HMI or software

2. Calibrate the full range (100% opening corresponds to 10V/20mA)

3. Test step response (target: overshoot<5%)

7、 Typical fault handling

Swiss VAT 590 series electric high fidelity air conditioning valve