SPIN150x high-quality substrate spin coating machine

design

The shell and drainage design facilitate switching between desktop and built-in models. Modular design enables users to upgrade equipment through various accessories, simplifying allocation operations and overall processing flow.

Liquid filtration trap

The SPINx series is equipped with a liquid filtration trap to protect critical components of the spin coating machine. It can collect all liquids or corrosion inhibitors that enter the vacuum pipeline through the processing chamber or vacuum chuck in a liquid container. The container can be viewed through the opening on the casing of the spin coating machine for easy maintenance.

Automatic lid

The lid can be automatically opened and closed through the user interface or foot pedal (ideal for glove box environments). In addition, the lid can be automatically opened at the final step of the process recipe.

Motor returns to zero position

The new SPINx series can set the motor return to zero position, making it easy to integrate into robot control/automation environments.

Standard accessories:

• Vacuum chuck suitable for 4-6 inch wafers

• Fragment adapter suitable for fragments of 10mm and larger size

Applicable process:

• coating

• clean

• Rinse/Dry

• develop

• etching

• PDMI and other processes

Hardware specifications:

• Liquid filtration trap

• Automatic lid (advanced version can also be controlled by foot pedal)

• Programmable motor returns to zero position

• Central injection bracket for syringes or dispensing nozzles

• Lid lock and vacuum sensor for user safety

• Large size (detachable) touch screen display

• USB port for storing recipes and conducting software updates on a USB drive

• Driver unit specification: Indirect brushless drive unit, up to 12000 revolutions per minute; High acceleration and precision, 1-30000 revolutions per minute; Clockwise/counterclockwise rotation and puppy mode; Design that can switch between desktop and built-in models