Rotating rotor vacuum gauge

FileTorr

Ultra clean, highly durable, and corrosion-resistant high vacuum pressure measurement solution

Core advantages:

• Can directly replace most ionization gauges (1:1 compatible)

• Self directed workRotating rotor vacuum gauge(SRG)

• Transmitting standard level accuracy

• Measurement range: 10 mbar to 5 × 10 ⁻⁷ mbar

• 100% linear output

• Zero drift (<1.5%/year)

• Corrosion resistance and sedimentation

• Replaceable sensor

• Ultra clean/sterile design

• No electronic components inside the vacuum chamber

• Design with the same lifespan as the equipment

• 24VDC power supply

• 0-10VDC configurable output

Typical applications:

• Fault ionization gauge replacement

• Ion implantation, dry etching

• Online vacuum insulation monitoring

Technical Specification

DosiTorr is based onRotating rotor vacuum gaugeProcess pressure gauges for SRG technology. It adopts a simple design of stainless steel spheres rotating by electromagnetic force, which does not affect the measured medium compared to Pirani gauge (thermal conduction) or ionization gauge (ionization effect), making it an ideal choice for high-purity process environments. Even in corrosive process environments, DosiTorr can maintain long-term stable high-precision measurements, thanks to the natural resistance of SRG sensors to deposition and corrosion.

SRG technology process advantages

The high precision and long-term stability of SRG technology have been validated for many years in the field of vacuum gauge calibration, such as ionization gauge calibration. Nowadays, this technology is presented in the form of autonomous process sensors:

• Ultra high precision: achieving a reading of ± 1% within the range of 0.1 mbar to 1 × 10 ⁻⁶ mbar

• 100% linear pressure reading (independent of gas type)

• Long term stability: Annual drift rate<1.5%

• Corrosion and deposition resistance of stainless steel sensors

• Safe and clean measurement: no pollution/no thermal radiation/no ionization effect

Enhanced process adaptation design:

• Magnetic shielding: resistant to external magnetic field interference

• Strengthening the magnetic levitation system: enhancing measurement reliability

• Integrated temperature sensor: automatic temperature drift compensation

• Higher speed: reduce vibration sensitivity

Principles of SRG Technology

Rotating rotor vacuum gaugeBased on the rotor deceleration effect caused by gas molecule adsorption desorption, the vacuum pressure is calculated by measuring the deceleration rate. The system consists of three major components:

1. sensor component

• Magnetic stainless steel sphere (sensor core)

• Installed in the sleeve connecting the vacuum system

2. Measurement head component

• Suspension/acceleration/measurement achieved through electromagnetic fields

• External to vacuum system

3. Electronic control unit

• Sensor Control and Signal Processing

Product Series

To meet different process requirements, multiple configuration schemes are provided: